Flow rate control apparatus
AssigneeMKS Japan, Inc.
InventorIsao Suzuki
Life of this patent
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Abstract
An actuator utilizing the pressure of a gas is used to operate a diaphragm-operated control valve. An operating force generated by the actuator is varied by feeding and discharging a gas such as N2 through a narrow metallic tube. This is conducted by remote control, by means of electromagnetic valves provided in an environment at room temperature. The state of the control valve is monitored by a flow rate sensor which detects an actual flow rate of a fluid being controlled. Based on a signal representative of the detected actual flow rate, the electromagnetic valves for the actuator are controlled so that the fluid always flows at a desired flow rate. The gas such as N2 is heated by a heat exchanger in a high-temperature atmosphere in the vicinity of the actuator, to thereby prevent cooling of the fluid being controlled.
Claims9
A flow rate control apparatus for controlling a fluid flow rate by controlling a degree of opening of an orifice through which the fluid flows, the flow rate control apparatus comprising:
- a control valve for controlling the degree of opening of the orifice by movement of an operably connected diaphragm which is operated by a pressure-operated valve actuator;
- a tube for applying a pressure to the valve actuator from a position remote from the valve actuator;
- a pressure control means for controlling the pressure to be applied to the valve actuator;
- and
- a heat exchanger provided at a portion of the tube for applying the pressure to the valve actuator;
- wherein the heat exchanger and the control valve are placed in an atmosphere having the same temperature.
A flow rate control apparatus for controlling a fluid flow rate by controlling a degree of opening of an orifice through which the fluid flows, the flow rate control apparatus comprising:
- a control valve for controlling the degree of opening of the orifice by movement of an operably connected diaphragm which is operated by a pressure-operated valve actuator;
- a tube for applying a pressure to the valve actuator from a position remote from the valve actuator;
- a flow rate sensor for detecting an actual flow rate of the fluid under control of the control valve;
- a controlling part for controlling the pressure to be applied to the valve actuator so that an actual flow rate signal representative of the actual flow rate detected by the flow rate sensor coincides with a flow rate command signal externally applied to the controlling part;
- and
- a heat exchanger provided at a portion of the tube for applying the pressure to the valve actuator;
- wherein the heat exchanger and the control valve are placed in an atmosphere having the same temperature.
A flow rate control apparatus for controlling a fluid flow rate by controlling a degree of opening of an orifice through which the fluid flows, the flow rate control apparatus comprising:
- a control valve for controlling the degree of opening of the orifice by movement of an operably connected diaphragm which is operated by a pressure-operated valve actuator;
- a tube for applying a pressure to the valve actuator from a position remote from the valve actuator;
- a controlling part for controlling the pressure to be applied to the valve actuator;
- and
- a heat exchanger provided at a portion of the tube for applying the pressure to the valve actuator;
- wherein the heat exchanger and the control valve are placed in an atmosphere having the same temperature.
Dependencies are inferred from the claim text.