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US 6,178,974 B2Granted
Cleaning apparatus and method
AssigneeTDK Corporation
InventorsKanji Kobayashi, Masao Yamaguchi, Shinya Yoshihara, Toshio Kubota, Jun Kudo
Life of this patent
Estimating the term…
Abstract
A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.
Claims7
A cleaning method for cleaning an object to be cleaned, comprising the steps of:
- immersing said object in cleaning fluid;
- vibrating said cleaning fluid;
- and
- minutely vibrating said object in two different directions during said vibration of said cleaning fluid.
1 more element
Dependencies are inferred from the claim text.