Wire saw control method and wire saw
AssigneesTokyo Seimitsu Co., Ltd., Super Silicon Crystal Research Institute Corp.
InventorsShinji Nagatsuka, Shigeru Okubo, Hiroshi Kawarai, Hiroshi Oishi, Keiichiro Asakawa, Junichi Matsuzaki
Life of this patent
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Abstract
A sensor measures a displacement of a sensor, and a control part of a wire saw calculates a sliding load in accordance with the measured displacement and an initial tension of the wire. Then, the control part compares the calculated cutting load with a preset reference value, and controls an ingot feed speed for a drive unit of a workpiece feed table in accordance with the results of the comparison.
Claims9
A wire saw control method, which comprises forming a wire row by winding a wire on a plurality of grooved rollers, running said wire, feeding a workpiece to said wire row and pressing said workpiece against said wire row while supplying a machining liquid to said wire row to thereby slice said workpiece into a number of wafers;
- said method comprising the steps of:
- measuring a displacement of said wire forming said wire row during the slicing of said workpiece;
- calculating a cutting load against said wire row in accordance with said measured displacement and an initial tension of said wire;
- and
- comparing said calculated cutting load with a preset reference value, and then slicing said workpiece while controlling a workpiece feed speed according to the results of the comparison.
A wire saw, which forms a wire row by winding a wire on a plurality of grooved rollers, runs said wire, feeds a workpiece to said wire row and presses said workpiece against said wire row while supplying a machining liquid to said wire row to thereby slice said workpiece into a number of wafers;
- said wire saw comprising:
- a sensor for measuring a displacement of said wire forming said wire row during the slicing of said workpiece;
- workpiece feeding means for moving said workpiece forward and backward with respect to said wire row;
- and
- control means for calculating a cutting load against said wire row in accordance with said displacement measured by said sensor and an initial tension of said wire, comparing said calculated cutting load with a preset reference value and controlling a workpiece feed speed of said workpiece feeding means according to the results of the comparison.
Dependencies are inferred from the claim text.