Probe tip locator
AssigneeLucent Technologies Inc.
InventorsJoseph Edward Griffith, Charles E. Bryson, III, Jeffrey Bruce Bindell
Life of this patent
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AssigneeLucent Technologies Inc.
InventorsJoseph Edward Griffith, Charles E. Bryson, III, Jeffrey Bruce Bindell
Estimating the term…
A probe tip locator for use in determining the x-axis location and y-axis location of a probe tip of a microscope relative to the locator, the locator comprising a plurality of first reference lines parallel in a first direction, each of the first reference lines representing a predetermined x-axis location of the probe tip; a plurality of sets of parallel encoded bit fields, each one of the sets corresponding to one of the first reference lines; and a plurality of second reference lines parallel in a second direction, each one of the second reference lines intersecting at least one of the first reference lines at an acute angle, such that a scan of a portion of the locator is used to determine the x-axis location and y-axis location of the probe tip relative to the probe tip locator by movement of the probe tip relative to the probe tip locator.
A probe tip locator for use in determining the x-axis location and y-axis location of a probe tip of a microscope relative to a locator, said locator comprising:
A probe tip locator for use in determining the x-axis location and y-axis location of a probe tip of a microscope relative to a locator, said locator comprising:
A method of determining the x-axis location and y-axis location of a probe tip of a microscope relative to a probe tip locator comprising the steps of:
A method of determining the x-axis location and y-axis location of a probe tip of a microscope relative to a probe tip locator comprising the steps of:
A system for determining the x-axis location and y-axis location of a probe tip of a microscope relative to a stage coordinate system comprising:
A system for determining the x-axis location and y-axis location of a probe tip of a microscope relative to a stage coordinate system comprising:
A system for determining the x-axis location and y-axis location of a probe tip of a microscope relative to a scan actuator comprising:
A system for determining the x-axis location and y-axis location of a probe tip of a microscope relative to a scan actuator comprising:
Dependencies are inferred from the claim text.