Scanning evanescent electro-magnetic microscope
AssigneeThe Regents of the University of California
InventorsXiao-Dong Xiang, Chen Gao
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Abstract
A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.
Claims15
A scanning electromagnetic wave microscope comprising:
- a) a scanning electromagnetic wave microscope probe having an aperture in an electrically conducting endwall and having a center conducting element comprising a sharpened tip that extends through the aperture beyond the endwall;
- b) a frequency detector for calculating an initial and a final resonant frequency of a resonator, called a frequency shift;
- c) a power detector for measuring electromagnetic energy values;
- and
- d) a computer programmed to calculate an initial and final ratio of electromagnetic energy dissipated and stored in the resonator, called a Q shift.
Dependencies are inferred from the claim text.