US 6,172,364 B2 · Charged particle beam irradiation apparatus

Abstract

A reflection prevention board of a charged particle beam irradiation apparatus of the present invention comprises a laminate sheet having a plurality of thin films and a plurality of microholes through the laminate sheet. According to the present invention the reflection prevention board can be manufactured at a lower cost, the reason being that it is easier to form microholes in the thin films and then laminate these thin films in an aligned relation than to drill holes through a thicker sheet. By doing so it is possible to achieve a better yield. Further, much deeper microholes, which might not otherwise be achieved on a thick sheet, can be formed by using more thin films and a reflection prevention effect can be improved by doing so.

Claims15

Dependent claims

A charged particle beam irradiation apparatus, comprising

an irradiating device configured to irradiate a sample with a charged particle beam;
and
a reflection prevention board configured to prevent the sample from being re-irradiated with reflected particles and/or secondary particles, the reflection prevention board comprising a laminated sheet of a plurality of thin films and a plurality of microholes through the laminated sheet, the microholes being formed in an inclined relation to the reflection prevention board.

Dependencies are inferred from the claim text.

Facts

Application

09/118,924Filed 20 Jul 1998

Priority

JP 9-20300429 Jul 1997

Granted

9 Jan 2001

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

H01J 3/40
Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps: arrangements for removing…
H01J 37/02
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or…: details
H01J 2237/0213
Protection arrangements: avoiding deleterious effects due to interactions between particles and tube elements
H01J
Electric discharge tubes or discharge lamps

Charged particle beam irradiation apparatus

Life of this patent

Charged particle beam irradiation apparatus

Life of this patent

Abstract

Claims15