Prober-tester electrical interface for semiconductor test

An apparatus for providing an electrical connection between a load board and a probe card assembly, the load board having a plurality of first contacts, the load board being for interfacing with a test head, and the probe card assembly having a plurality of second contacts, the probe card assembly being for interfacing with a device-under-test (DUT), the apparatus comprising:

• a load board assembly for incorporating the load board, the load board assembly having a plurality of apertures and one of a plurality of cam members and a plurality of cam grooves;
• an electrical interface having a plurality of conductive elements for establishing electrical contact between the first contacts and the second contacts, the electrical interface also having a plurality of guide pins, the apertures of the load board assembly being for receiving the guide pins thereby aligning the conductive elements with the first contacts;
• and
• a cap ring having the other of the plurality of cam members and the plurality of cam grooves;
• wherein the probe card assembly has a plurality of apertures for receiving the guide pins thereby aligning the second contacts with the conductive elements, and wherein rotation of the cap ring relative to the load board assembly engages the cam members in the cam grooves thereby compressing the electrical interface between the load board and the probe card assembly and establishing the electrical connection.

An apparatus for providing an electrical connection between a load board and a probe card assembly, the load board having a plurality of first contacts, the load board being for interfacing with a test head, and the probe card assembly having a plurality of second contacts, the probe card assembly being for interfacing with a device-under-test (DUT), the apparatus comprising:

• a load board assembly for incorporating the load board, the load board assembly having a plurality of apertures and one of a plurality of cam members and a plurality of cam grooves;
• an electrical interface having a plurality of conductive elements for establishing electrical contact between the first contacts and the second contacts, the electrical interface also having a plurality of apertures for aligning with the apertures of the load board assembly thereby aligning the conductive elements with the first contacts;
• and
• a cap ring having the other of the plurality of cam members and the plurality of cam grooves;
• wherein the probe card assembly has a plurality of guide pins for aligning the apertures of the load board assembly and the electrical interface thereby aligning the second contacts with the conductive elements, and wherein rotation of the cap ring relative to the load board assembly engages the cam members in the cam grooves thereby compressing the electrical interface between the load board and the probe card assembly and establishing the electrical connection.

An apparatus for providing an electrical connection between a load board and a probe card assembly, the load board having a plurality of first contacts, the load board being for interfacing with a test head, and the probe card assembly having a plurality of second contacts, the probe card assembly being for interfacing with a device-under-test (DUT), the apparatus comprising:

• a load board assembly for incorporating the load board, the load board assembly having one of a plurality of guide pins, a first plurality of apertures for receiving the guide pins, and a second plurality of apertures for receiving the guide pins;
• an electrical interface having a plurality of conductive elements for establishing electrical contact between the first contacts and the second contacts, the electrical interface having another of the plurality of guide pins, the first plurality of apertures, and the second plurality of apertures for facilitating alignment of the conductive elements with the first contacts;
• and
• a compression assembly;
• wherein the probe card assembly has the remaining one of the plurality of guide pins, the first plurality of apertures, and the second plurality of apertures for facilitating alignment of the second contacts with the conductive elements, and wherein actuation of the compression assembly when the guide pins are engaged in the first and second pluralities of apertures compresses the electrical interface between the load board and the probe card assembly thereby establishing the electrical connection;
• wherein the load board assembly comprises one of a plurality of cam members and a plurality of cam grooves, and the compression assembly comprises the other of the plurality of cam members and the plurality of cam grooves, wherein rotation of the compression assembly relative to the load board assembly engages the cam members in the cam grooves thereby compressing the electrical interface between the load board and the probe card assembly and establishing the electrical connection.