Interlocking apparatus

An interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that a control target has shifted to a predetermined state;
• operation stopping means for setting the control target to an operation stop state when at least one of said plurality of determination means determines that the control target has shifted to the predetermined state;
• and
• alarm means for generating an alarm when determination results of said plurality of determination means are different from each other.

An equipment having an interlocking apparatus and a system controlled by said interlocking apparatus, said interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that said system has shifted to a predetermined state:
• operation stopping means for setting said system to an operation stop state when at least one of said plurality of determination means determines that said system has shifted to the predetermined state;
• input means for inputting a restoration instruction instructing that said system set in the operation stop state by said operation stopping means is restored to an operation state;
• and
• restoring means responsive to the restoration instruction to restore said system to the operation state only when the operation stopping means sets said system in the operation stop state determined by all of said plurality of determination means determining that said system has shifted to the predetermined state.

An equipment having an interlocking apparatus and a robot controlled by said interlocking apparatus, said interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that said robot has shifted to a predetermined state;
• operation stopping means for setting said robot to an operation stop state when at least one of said plurality of determination means determines that said robot has shifted to the predetermined state;
• input means for inputting a restoration instruction instructing that said robot set in the operation stop state by said operation stopping means is restored to an operation state;
• and
• restoring means responsive to the restoration instruction to restore said robot to the operation state only when the operation stopping means sets said robot in the operation stop state determined by all of said plurality of determination means determining that said robot has shifted to the predetermined state.

An equipment having an interlocking apparatus and a semiconductor exposure apparatus controlled by said interlocking apparatus, said interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that said semiconductor exposure apparatus has shifted to a predetermined state;
• operation stopping means for setting said semiconductor exposure apparatus to an operation stop state when at least one of said plurality of determination means determines that said semiconductor exposure apparatus has shifted to the predetermined state;
• input means for inputting a restoration instruction instructing that said semiconductor exposure apparatus set in the operation stop state by said operation stopping means is restored to an operation state;
• and
• restoring means responsive to the restoration instruction to restore said semiconductor exposure apparatus to the operation state only when the operation stopping means sets said semiconductor exposure apparatus in the operation stop state determined by all of said plurality of determination means determining that said semiconductor exposure apparatus has shifted to the predetermined state.

An equipment having an interlocking apparatus and a system controlled by said interlocking apparatus, said interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that said system has shifted to a predetermined state;
• operation stopping means for setting said system to an operation stop state when at least one of said plurality of determination means determines that said system has shifted to the predetermined state;
• and
• alarm means for generating an alarm when determination results of said plurality of determination means are different from each other.

An equipment having an interlocking apparatus and a robot controlled by said interlocking apparatus, said interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that said robot has shifted to a predetermined state;
• operation stopping means for setting said robot to an operation stop state when at least one of said plurality of determination means determines that said robot has shifted to the predetermined state;
• and
• alarm means for generating an alarm when determination results of said plurality of determination means are different from each other.

An equipment having an interlocking apparatus and a semiconductor exposure apparatus controlled by said interlocking apparatus, said interlocking apparatus comprising:

• a plurality of determination means independent of each other to determine that said semiconductor exposure apparatus has shifted to a predetermined state;
• operation stopping means for setting said semiconductor exposure apparatus to an operation stop state when at least one of said plurality of determination means determines that said semiconductor exposure apparatus has shifted to the predetermined state;
• and
• alarm means for generating an alarm when determination results of said Plurality of determination means are different from each other.