Concave face wire bond capillary
AssigneeMicron Technology, Inc.
InventorsGregory M. Chapman, Michael J. Bettinger, Jennifer A. Due
Life of this patent
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Abstract
An improved wire bonding capillary used in the bonding of wires to the bond pads of a semiconductor device and the leads of a lead frame. The wire bonding capillary having a working tip having a working surface including a flat annular portion surrounding the wire feed aperture in the capillary and a concave surface extending therefrom to the intersection with the radius extending from the external tip diameter of the working tip.
Claims7
A wire bonding capillary comprising:
- a wire bonding capillary tool including:
- a capillary tip having an elongated hole therethrough, the elongated hole terminating at one end of the capillary tip and
- a face on the one end of the capillary tip, the face including a first frusto-conical surface extending from a portion of the elongated hole of the capillary tip, a second frusto-conical surface having a portion thereof connected to the first frusto-conical surface, a substantially horizontal annular surface having a portion connected to the second frusto-conical surface, wherein said substantially horizontal annular surface is defined by the radius of curvature of the capillary tip and a concave surface with a degree of curvature said concave surface extending from a portion of the substantially horizontal annular surface, wherein the degree of curvature of the concave surface is defined by a radius of curvature and wherein the degree of curvature of the concave surface provides for relative clearance of the capillary tip from adjacent components.
The wire bonding capillary of claim 4, wherein the substantially horizontal annular curved surface intersects an outer diameter of the capillary tip of the wire bonding capillary tool.
A method of forming a wire bond on a bond pad of a semiconductor device having an active surface thereon having at least one bond pad thereon, said method comprising:
- providing a wire bonding capillary including:
- a capillary tip having an elongated hole therethrough, the hole terminating at one end of the elongated capillary tip;
- and
- a face on the one end of the capillary tip, the face including a first frusto-conical surface extending from a portion of the elongated hole of the capillary tip, a second frusto-conical surface having a portion thereof connected to the first frusto-conical surface, a substantially horizontal annular surface having a portion connected to the second frusto-conical surface, and a concave surface having a portion extending from the substantially horizontal annular surface;
- extending a wire through the hole in the capillary tip;
- heating a portion of the elongated wire to form a mass on an end thereof,
- contacting said at least one bond pad on said active surface of said semiconductor device with the mass on the end of the wire;
- and
- securing the mass on the end of the wire to said at least one bond pad on said active surface of said semiconductor device, forming a wire bond thereon having a substantially horizontal annular surface thereon without contacting said active surface of said semiconductor device, said mass on the end of the wire including a first frusto-conical portion adjacent the wire, a second frusto-conical portion connected to the first frusto-conical portion, and a substantially horizontal annular portion connected to the second frusto-conical portion.
A method of forming a wire bond on a lead finger of a lead frame, said method comprising:
- providing a wire bonding capillary including:
- a capillary tip having an elongated hole therethrough, the hole terminating at one end of the elongated capillary tip;
- a face on an end of the capillary tip, the face including a first frusto-conical surface extending from a portion of the elongated hole of the capillary tip, a second frusto-conical surface having a portion thereof connected to the first frusto-conical surface, a substantially horizontal annular surface having a portion connected to the second frusto-conical surface, and having a concave surface extending from the substantially horizontal annular surface;
- extending a wire through the hole in the capillary tip;
- heating a portion of the elongated wire,
- contacting said lead finger of said lead frame with the heated portion of the wire;
- and
- securing the wire to said lead finger, forming a wire bond thereon having a curved convex surface on a portion thereof formed by at least a portion of the concave surface of the face of the capillary tip.
Dependencies are inferred from the claim text.