Method of making high performance, low noise isotropic magnetic media including a chromium underlayer
AssigneeKomag, Inc.
InventorsCaroline A. Ross, Tu Chen
Life of this patent
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Abstract
A method of manufacturing a magnetic disk includes the steps of depositing a sublayer, a Cr layer and a Co based magnetic layer on a substrate. The sublayer causes the Cr crystals to avoid growing with a predominantly (200) orientation. Because of this the magnetic layer will be isotropic in the film plane and independent of any texture or scratch marks in the substrate.
Claims49
A method for manufacturing a magnetic disk comprising the steps of:
- forming a crystalline layer on a substrate;
- causing the surface of the structure formed by the preceding process step to have a temperature of at least 150.degree. C.;
- depositing a layer comprising Cr on said crystalline layer, and in an epitaxial relation with said crystalline layer, the crystallites within said layer comprising Cr having a substantially random orientation, said step of depositing being performed after said step of causing;
- and
- forming a magnetically isotropic Co based magnetic layer on said layer comprising Cr and in an epitaxial relation with said layer comprising Cr.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed on said substrate;
- an underlayer comprising Cr formed in an epitaxial relation with said sublayer, the crystallites within said underlayer having a substantially random orientation;
- and
- a magnetically isotropic Co magnetic alloy layer formed in an epitaxial relation with said underlayer.
A method for manufacturing a magnetic disk comprising the steps of:
- forming a crystalline layer on a substrate;
- depositing a layer comprising Cr on said crystalline layer, the crystallites within said layer comprising Cr having a substantially random orientation;
- and
- forming a magnetically isotropic Co based magnetic layer on said layer comprising Cr.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed on said substrate;
- an underlayer comprising Cr formed on said sublayer, the crystallites within said underlayer having a substantially random orientation;
- and
- a magnetically isotropic Co magnetic alloy layer formed on said underlayer.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed on said substrate;
- an underlayer comprising Cr having randomly oriented grains;
- a magnetically isotropic Co magnetic alloy layer formed in an epitaxial relation with said underlayer.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed on said substrate;
- an underlayer comprising Cr, the crystallites within said underlayer comprising Cr having a substantially random orientation;
- and
- a Co magnetic alloy having randomly oriented grains.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed over said substrate;
- an underlayer comprising Cr formed over said sublayer;
- and
- a magnetic alloy film formed over said underlayer, said magnetic alloy being isotropic in the plane of said magnetic alloy film.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed over said substrate, the crystallites of said crystalline sublayer being randomly oriented;
- an underlayer comprising Cr formed over said sublayer;
- and
- a magnetic alloy film formed over said underlayer.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed over said substrate;
- a crystalline underlayer comprising Cr formed over said sublayer, the crystallites in said underlayer being randomly oriented;
- and
- a magnetic alloy film formed over said underlayer.
A magnetic disk comprising:
- a substrate;
- a crystalline sublayer formed over said substrate;
- an underlayer comprising Cr formed over said sublayer;
- and
- a magnetic alloy film formed over said underlayer, said magnetic alloy comprising crystallites that are randomly oriented in the plane of said magnetic alloy film.
A method for making a magnetic disk comprising:
- forming a crystalline sublayer over said substrate;
- forming a underlayer comprising Cr over said sublayer;
- and
- forming a magnetic alloy film over said underlayer, said magnetic alloy being isotropic in the plane of said magnetic alloy film.
A magnetic disk comprising:
- forming a crystalline sublayer formed over a substrate;
- forming an underlayer comprising Cr over said sublayer;
- and
- forming a magnetic alloy film over said underlayer, said magnetic alloy comprising crystallites that are randomly oriented in the plane of said magnetic alloy film.
A method for making a magnetic disk comprising:
- forming a crystalline sublayer over said substrate, the crystallites in said sublayer having a random orientation;
- forming an underlayer comprising Cr over said sublayer;
- and
- forming a magnetic alloy film over said underlayer.
A method for making a magnetic disk comprising:
- forming a crystalline sublayer formed over a substrate;
- forming an underlayer comprising Cr over said sublayer, the crystallites within said underlayer having a random orientation;
- and
- forming a magnetic alloy film over said underlayer.
A method for making a magnetic film comprising:
- forming a crystalline layer on a substrate;
- causing the surface of the structure formed by the preceding process step to have a temperature of at least 150.degree. C;
- forming an underlayer comprising Cr on said crystalline layer;
- and
- forming a magnetic layer on said underlayer.
Dependencies are inferred from the claim text.