US 6,155,768 AGranted

Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput

AssigneeKensington Laboratories, Inc.

InventorsPaul Bacchi, Paul S. Filipski

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Abstract

Two multiple link robot arms (10) are mounted to a torso link (11), and each of them includes an offset hand (30) and two motors (50, 52) capable of independent operation that provides movement of the offset hand along along combinations of angular, radial, linear, and curvilinear paths. The first motor rotates a forearm (22) about an elbow axis (24), and the second motor rotates an upper arm (14) about a shoulder axis (16). A motor controller (54) controls the first and second motors in two operational states that respectively enable linear extension or retraction of the robot arm radial to the shoulder axis and enable angular displacement of the hand about the shoulder axis. A distal end (34) of each offset hand is offset such that during first operational state motion, the distal end follows paths parallel to lines radial to the shoulder axis. The offset distance (240) is set so that when properly rotated in the second operational state, both offset hands can follow a common hand extension line (44) that is a perpendicular bisector between the shoulder axes of the robot arms. This allows specimens (206) retrieved by either offset hand to be placed on a processing station (208) located along the hand extension line.

Claims29

Dependent claims

A robot arm system for moving specimens having effective centers among first and second specimen storage cassettes and a specimen processing station, the robot arm system including first and second robot arm mechanisms rotatable about respective first and second shoulder axes and each operable to move respective first and second wrist axes along linear paths that extend radially from the respective first and second shoulder axes, the first and second robot arm mechanisms further operable to angularly shift the respective first and second wrist axes about the respective first and second shoulder axes such that the linear paths are shiftable about the first and second shoulder axes, an improvement comprising:

a first offset hand extending from the first wrist axis for grasping the effective center of one of the specimens such that when the first robot arm mechanism moves the first wrist axis along a first linear path, the effective center of the specimen moves along a first offset linear path that is parallel to and spaced apart a first offset distance from the first linear path, and when the first robot arm mechanism shifts the first wrist axis into coincidence with a second linear path, the first offset hand is movable along a second offset linear path that is parallel to and spaced apart the first offset distance from the second linear path;
a second offset hand extending from the second wrist axis for grasping the effective center of one of the specimens such that when the second robot arm mechanism moves the second wrist axis along a third linear path, the effective center of the specimen moves along a third offset linear path that is parallel to and spaced apart a second offset distance from the third linear path, and when the second robot arm mechanism shifts the second wrist axis into coincidence with a fourth linear path, the second offset hand is movable along a fourth offset linear path that is parallel to and spaced apart the second offset distance from the fourth linear path;
and
the first and second shoulder axes being spaced apart such that the second offset linear path can substantially share a common linear path with the fourth offset linear path.

1 more element

In a robot arm system including first and second robot arm mechanisms rotatable about respective first and second shoulder axes and each operable to move respective first and second wrist axes along linear paths that extend radially from the respective first and second shoulder axes, the first and second robot arm mechanisms further operable to angularly shift the respective first and second wrist axes about the respective first and second shoulder axes such that the linear paths are shiftable about the first and second shoulder axes, a method for moving specimens having effective centers among first and second specimen storage cassettes and a specimen processing station comprising:

providing a first offset hand extending from the first wrist axis for grasping the effective center of one of the specimens such that when the first robot arm mechanism moves the first wrist axis along a first linear path, the effective center of the specimen moves along a first offset linear path that is parallel to and spaced apart a first offset distance from the first linear path, and when the first robot arm mechanism shifts the first wrist axis into coincidence with a second linear path, the first offset hand is movable along a second offset linear path that is parallel to and spaced apart the first offset distance from the second linear path;
providing a second offset hand extending from the second wrist axis for grasping the effective center of one of the specimens such that when the second robot arm mechanism moves the second wrist axis along a third linear path, the effective center of the specimen moves along a third offset linear path that is parallel to and spaced apart a second offset distance from the third linear path, and when the second robot arm mechanism shifts the second wrist axis into coincidence with a fourth linear path, the second offset hand is movable along a fourth offset linear path that is parallel to and spaced apart the second offset distance from the fourth linear path;
and
spacing apart the first and second shoulder axes such that the second offset linear path can substantially share a common linear path with the fourth offset linear path.

1 more element

Dependencies are inferred from the claim text.

Facts

Application: 09/016,021Filed 30 Jan 1998
Granted: 5 Dec 2000
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H10P 72/7602
Using mechanical means, e.g. clamps or pinches: the wafers being placed on a robot blade or gripped by a gripper for conveyance
H10P 72/3302
Into and out of processing chamber: mechanical parts of transfer devices
H10P 72/3402
The wafers being stored in a carrier, involving loading and unloading: mechanical parts of transfer devices
Y10S 414/137
Associated with semiconductor wafer handling: including means for charging or discharging wafer cassette