Microdevices based on surface tension and wettability that function as sensors, actuators, and other devices

Abstract

Microdevices based on surface tension and wettability are useful as sensors, detectors, actuators, pumps, among other applications. As sensors and detectors they can respond to numerous stimuli such as pressure, temperature, gravity, rotation, acceleration, oscillation, chemical environments, magnetic fields, electric fields, radiation, and particle beams with a great choice of output options. Because of their design, they can be used in a broad range of temperatures and environments. Additionally, unlike other microsensors and detectors, these devices can be exposed to forces and pressures orders of magnitudes greater than their design limit and still return to their original accuracy and precision. These microdevices are also useful as actuators, pumps, valves and shutters. It is possible by joining these devices together to form complex devices that are able to control macroscopic flows for example. They are also able to perform complex electrical switching operations.

Dependencies are inferred from the claim text.