Photonic device having an integal guide and method of manufacturing
AssigneeGore Enterprise Holdings, Inc.
InventorsRobert F. Traver, Jr., Theodore D. Lowes, Mark N. Donhowe, Sean P. Kilcoyne
Life of this patent
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Abstract
A process is provided for creating microstructure coupling guides for aligning photonic devices with optical signal carrying apparatuses. The process includes applying a photoresist to a semiconductor material, spinning the semiconductor material, baking the semiconductor material, exposing the photoresist, baking the semiconductor material a second time, and developing the resist. The process creates a microstructure that acts as an integral guide to align and maintain the relative position between an optical signal carrying apparatus and a photonic device.
Claims28
An article comprising:
- a photonic device having an optical signal receiving surface and an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second free end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element.
An article comprising:
- a photonic device having an optical signal receiving surface;
- and
- an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element and being formed by a plating material, wherein a resist is used to form openings which are filled with the plating material before the resist is removed.
An article comprising:
- a photonic device having an optical signal receiving surface;
- an optical element guide formed by a photo-definable polymer material, said guide having a first end adjacent said surface and a second end extending outwardly away from said surface, and being configured to align and receive an optical signal conveying element.
Preparing a photonic device comprising:
- applying a polymeric material to a surface of a substrate having the photonic device;
- and
- forming an integral guide from the polymeric material on the photonic device, said integral guide extending outwardly from said surface to form a free end and being configured to align and receive an optical signal conveying element.
Dependencies are inferred from the claim text.