High pulse rate pulse power system with fast rise time and low current
AssigneeCymer, Inc.
InventorsWilliam N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
Life of this patent
Estimating the term…
Loading patent…
AssigneeCymer, Inc.
InventorsWilliam N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
Estimating the term…
A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
A high pulse rate pulse power source providing pulse power to a pair of electrodes comprising:
Dependencies are inferred from the claim text.