Evaluation method for thin film molecular orientation, evaluation apparatus for the orientation and recording medium
AssigneeNEC Corporation
InventorIchiro Hirosawa
Life of this patent
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Abstract
Dependency of the polarization state of a reflected infrared ray generated when an infrared ray in a fixed polarization state is incident on a sample thin film on incidence orientation is measured while rotating the sample thin film in a plane parallel to a surface thereof. Next, an optical anisotropy of the sample thin film is determined based on the dependency of the polarization state on the incidence orientation. Then, the state of molecular orientation in the sample thin film is determined based on the optical anisotropy.
Claims26
A method of evaluating molecular orientation in a thin film, comprising the steps of:
- analyzing dependency of a polarization state of a reflected infrared ray which is generated when an infrared ray in a fixed polarization state is incident on a sample thin film on incidence orientation, while rotating said sample thin film in a plane parallel to a surface thereof;
- determining optical anisotropy of said sample thin film based on said dependency of said polarization state on incidence orientation;
- and
- determining a state of molecular orientation in said sample thin film based on said optical anisotropy.
A method of evaluating molecular orientation in a thin film, comprising the steps of:
- analyzing dependency of a polarization state of a reflected infrared ray which is generated when an infrared ray in a fixed polarization state is incident on a sample thin film on incidence orientation at a plurality of measurement points on said sample thin film, while rotating said sample thin film in a plane parallel to a surface thereof;
- and
- obtaining an in-plane distribution of a state of molecular orientation in said sample thin film based on measurement results at said respective measurement points.
An apparatus for evaluating molecular orientation in a thin film, comprising:
- a light source which generates an infrared ray in a fixed polarization state and causes said infrared ray to be incident on a sample thin film;
- a rotary stage which rotates said sample thin film in a plane parallel to a surface thereof;
- a detector which detects an infrared ray reflected from said sample thin film;
- and
- an analyzer which analyzes dependency of a polarization state of said reflected infrared ray detected by said detector on incidence orientation, while said rotary stage rotating said sample thin film in the plane parallel to the surface thereof, determines optical anisotropy of said sample thin film from said dependency of said polarization state on incidence orientation, and determines a state of molecular orientation in said sample thin film based on said optical anisotropy.
An apparatus for evaluating molecular orientation in a thin film, comprising:
- a light source which generates an infrared ray in a fixed polarization state and causes said infrared ray to be incident on a sample thin film;
- a rotary stage which rotates said sample thin film in a plane parallel to a surface thereof;
- a parallel translation stage which moves said sample thin film in a line in the plane parallel to the surface thereof;
- a detector which detects an infrared ray reflected from said sample thin film;
- and
- an analyzer which analyzes dependency of a polarization state of said reflected infrared ray detected by said detector on incidence orientation at a plurality of measurement points of said sample thin film, while said rotary stage rotating said sample thin film in the plane parallel to the surface thereof and said parallel translation stage scanning said sample thin film, and determines a state of molecular orientation in said sample thin film based on measurement results at said respective measurement points.
A computer-readable recording medium, storing a program for causing a computer to conduct the processes for:
- controlling a rotary stage to rotate a sample thin film in a plane parallel to a surface thereof;
- receiving detection data from a detector and analyzing dependency of a polarization state of a reflected infrared ray which is generated when an infrared ray in a fixed polarization state from a light source is incident on said sample thin film on incidence orientation;
- and
- determining a state of molecular orientation in said sample thin film based on said dependency of said polarization state on incidence orientation.
A computer-readable recording medium, storing a program for causing a computer to conduct the processes for:
- controlling a rotary stage to rotate a sample thin film in a plane parallel to a surface thereof;
- controlling a parallel translation stage to move said sample thin film in a line in the plane parallel to the surface thereof;
- receiving detection data from a detector and analyzing dependency of a polarization state of a reflected infrared ray which is generated when an infrared ray in a fixed polarization state from a light source is incident on said sample thin film on incidence orientation at a plurality of measurement points on said sample thin film;
- and
- determining a state of molecular orientation in said sample thin film based on said dependency of said polarization state on incidence orientation at said respective measurement points.
Dependencies are inferred from the claim text.