Laser irradiation system
AssigneeTopcon Corporation
InventorsFumio Ohtomo, Kunihiro Hayashi
Life of this patent
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Abstract
A laser irradiation system according to the present invention comprises a laser light emitter for emitting a laser beam, a rotator for irradiating the laser beam emitted from said laser light emitter by rotary irradiation and for forming a laser plane, a tilt setting unit for tilting said rotator and said laser plane, a photodetection unit integrated with said tilt setting unit for receiving a reflection laser beam reflected from a target which reflects the laser beam from said rotator as a reflection laser beam, wherein said photodetection unit comprises a photodetection element being long in a scanning direction of the laser beam.
Claims9
A laser irradiation system, comprising a laser light emitter for emitting a laser beam, a rotator for irradiating the laser beam from said laser light emitter by rotary irradiation and for forming a laser plane, a tilt setting unit for tilting said rotator and said laser plane, a photodetection unit integrated with said tilt setting unit for receiving a reflection laser beam reflected from a target which reflects the laser beam from said rotator as a reflection laser beam, wherein said photodetection unit comprises a photodetection element that is at least longer in a dimension along a scanning direction than its dimension perpendicular to said scanning direction.
Dependencies are inferred from the claim text.