Test method and device for semiconductor circuit
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMikio Asai, Ryoichi Takagi
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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMikio Asai, Ryoichi Takagi
Estimating the term…
A semiconductor test device capable of solving a problem of a conventional one in that in the resistance measurement of a semiconductor integrated circuit it was difficult for the measurement error due to contact resistance or wiring resistance to be limited within a desired amount. The present semiconductor test device includes, in a semiconductor integrated circuit having a first semiconductor switch functioning as a pullup resistor and a second semiconductor switch functioning as a pulldown resistor, a measuring circuit for bringing the first and second semiconductor switches into conduction at the same time in response to a signal fed from a control circuit, a voltage measuring circuit for measuring the voltage at a connecting point between the two semiconductor switches, and a current measuring circuit for measuring a through current flowing through the two semiconductor switches.
A test method of a semiconductor circuit comprising the steps of:
A test device of a semiconductor circuit comprising:
A test device of a semiconductor circuit which includes a plurality of circuits to be measured, each of said plurality of circuits to be measured comprising:
A semiconductor circuit comprising:
A semiconductor circuit comprising:
Dependencies are inferred from the claim text.