Advanced CMOS circuitry that utilizes both sides of a wafer surface for increased circuit density
AssigneeAdvanced Micro Devices, Inc.
InventorsMark I. Gardner, H. Jim Fulford, Charles E. May
Life of this patent
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AssigneeAdvanced Micro Devices, Inc.
InventorsMark I. Gardner, H. Jim Fulford, Charles E. May
Estimating the term…
An integrated circuit employing both sides of a base substrate or wafer and a method of making the same are provided. In one aspect, the integrated circuit includes a base substrate that has a first side and a second side opposite the first side. The first side has a first semiconductor layer and a first isolation structure positioned thereon wherein the first side surrounds the first semiconductor layer. The second side has a second semiconductor layer and a second isolation structure positioned thereon wherein the second isolation structure surrounds the second semiconductor layer. A first circuit device is positioned on the first semiconductor layer. A second circuit device is positioned on the second semiconductor layer. The method enables simultaneous processing of both sides of a given wafer. Fabrication efficiency is increased through higher throughput and much higher yields per wafer.
A semiconductor wafer, comprising:
A semiconductor wafer, comprising:
An integrated circuit, comprising:
An integrated circuit, comprising:
Dependencies are inferred from the claim text.