Spacer patterned, high dielectric constant capacitor
AssigneeMicron Technology, Inc.
InventorDarwin A. Clampitt
Life of this patent
Estimating the term…
Abstract
A high dielectric constant memory cell capacitor and method for producing the same, wherein the memory cell capacitor utilizes relatively large surface area conductive structures of thin spacer width pillars or having edges without sharp corners that lead to electric field breakdown of the high dielectric constant material. The combination of high dielectric constant material in a memory cell along with a relatively large surface area conductive structure is achieved through the use of a buffer material as caps on the thin edges surfaces of the relatively large surface area conductive structures to dampen or eliminate the intense electric field which would be generated at the corners of the structures during the operation of the memory cell capacitor had the caps not been present.
Claims19
A large surface area, high dielectric constant capacitor formed by the method comprising:
- providing a first conductive material in electrical communication with a drain region of a semiconductor substrate;
- removing portions of said first conductive material to form large surface area conductive structures;
- providing a buffer material over edge portions of said large surface area conductive structures;
- applying a high dielectric constant material over said large surface area conductive structures and said buffer material;
- and
- applying a second conductive material over said high dielectric constant material.
A memory cell formed by the method comprising:
- providing a first conductive material in electrical communication with a drain region on a semiconductor substrate;
- removing portions of said conductive material to form large surface area conductive structures;
- providing a buffer material on edge portions of said large surface area conductive structures;
- applying a high dielectric constant material over said large surface area conductive structures and said buffer material;
- and
- applying a second conductive material over said high dielectric constant material.
A semiconductor DRAM formed by the method comprising:
- providing a first conductive material in electrical communication with a drain region on a semiconductor substrate;
- removing portions of said first conductive material to form large surface area conductive structures;
- providing a buffer material on edge portions of said large surface area conductive structures;
- applying a high dielectric constant material over said large surface area conductive structures and said buffer material;
- and
- applying a second conductive material over said high dielectric constant material.
A large surface area, high dielectric constant capacitor formed by the method comprising:
- providing an intermediate structure comprising a substrate having at least one thick field oxide area and at least one active area including at least one implanted drain region and at least one implanted source region, said intermediate structure further including at least one transistor gate member spanned between said at least one implanted drain region and said at least one implanted source region of said at least one substrate active area, and a barrier layer substantially covering said at least one field oxide area, said at least one active area, and said at least one transistor gate member;
- patterning a first resist layer on said barrier layer;
- etching said barrier layer to expose said at least one drain region of said substrate, forming at least one via;
- stripping said first resist layer;
- depositing a layer of conductive polysilicon material over said etched barrier layer to fill said at least one via;
- etching said polysilicon material, forming a recessed polysilicon plug in said at least one via;
- depositing a layer of metal over said barrier layer and said recessed polysilicon plug;
- forming a metal silicide layer at a contact area of said metal layer and said polysilicon material;
- removing an unreacted portion of said metal layer;
- depositing a metal barrier layer over said metal silicide layer and said barrier layer;
- applying a resist layer over said metal barrier layer, filling said at least one via;
- etching said resist layer such that a plug of said resist layer remains in said at least one via;
- etching said metal barrier layer to form a bottom contact adjacent said metal silicide layer;
- removing said plug;
- depositing a layer of conductive material over said barrier layer and into said at least one via to contact said bottom contact;
- patterning buffer material on said conductive material layer;
- etching said conductive material layer through said buffer material to form at least one large surface area conductive structure in said conductive material layer;
- depositing a layer of high dielectric constant material over said at least one large surface area conductive structure;
- and
- depositing an upper cell plate over said high dielectric constant material layer.
A large surface area, high dielectric constant capacitor comprising:
- a first conductive material in electrical communication with a drain region on a semiconductor substrate;
- said first conductive material including at least one large surface area conductive structure;
- a buffer material on at least one outer edge of said at least one large surface area conductive structure;
- a high dielectric constant material over said at least one large surface area conductive structure and said buffer material;
- and
- a second conductive material over said high dielectric constant material.
A semiconductor DRAM comprising:
- a first conductive material in electrical communication with a drain region of a semiconductor substrate;
- said first conductive material including at least one large surface area conductive structure with at least one upwardly protruding region;
- a buffer material on at least one upper edge of said at least one upwardly protruding region of said at least one large surface area conductive structure;
- a high dielectric constant material over said at least one large surface area conductive structure and said buffer material;
- and
- a second conductive material over said high dielectric constant material.
A large surface area, high dielectric constant capacitor having a first conductive material in electrical communication with a drain region of a semiconductor substrate, wherein said first conductive material includes large surface area conductive structures having upwardly protruding regions with buffer material on upper edges thereof, formed by the method comprising:
- providing a buffer material over the upper edges of said upwardly protruding regions of said large surface area conductive structures;
- applying a high dielectric constant material over said large surface area conductive structures and said buffer material;
- and
- applying a second conductive material over said high dielectric constant material.
Dependencies are inferred from the claim text.