Monolithic flow sensor and pressure sensor
AssigneeSilicon Microstructures, Inc.
InventorHenry V. Allen
Life of this patent
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Abstract
A monolithic, integrated circuit sensor combining both a differential pressure sensor and a flow sensor on the same silicon chip. The integrated circuit has a diaphragm with a number of piezo-resistive elements placed on it in the normal manner for a pressure sensor. In addition, a channel is provided between the spaces on the two sides of the diaphragm. The channel has a cross-section which is a fraction of the size of the diaphragm. In one embodiment, the channel is a hole in the diaphragm. In another embodiment, the channel is an etched groove in the frame supporting the diaphragm.
Claims10
An integrated circuit sensor comprising:
- a diaphragm having first and second sides in contact with first and second spaces, respectively;
- a sensing element on said diaphragm;
- and
- a channel extending from said first space to a position providing gas flow to said second space, said channel having a cross-section which is a fraction of an area of said diaphragm.
An integrated circuit sensor comprising:
- a diaphragm having first and second sides in contact with first and second spaces, respectively;
- a plurality of piezoresistive elements on said diaphragm;
- a channel extending from said first space to a position providing gas flow to said second space, said channel having a cross-section which is a fraction of an area of said diaphragm;
- a frame supporting said diaphragm;
- and
- a temperature compensation circuit, coupled to said piezoresistive elements, for compensation for flow measurements;
- wherein said channel comprises a V-shaped groove etched in said frame;
- and
- wherein said integrated circuit is formed from <100>
- silicon.
Dependencies are inferred from the claim text.