Polyfocal representation of the surface profile of any given object

A system for the simultaneous polyfocal imaging of a surface profile of any object, comprising:

• a light source for illuminating the object;
• at least one optical element for focusing light signals returning from the surface of the object;
• a detector for detecting the light signals;
• a processor for digitizing and processing the detected light signals;
• and
• a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler being configured as an arrangement of pin holes in series, each located at a focal point, a portion of the light returning from the different image planes being masked out at a pin hole located at the focal point of that portion of the light, and the light remaining being reflected to the next-in-series pin hole.

A system for the simultaneous polyfocal imaging of the surface profile of any object, comprising:

• a light source for illuminating the object;
• at least one optical element for focusing light signals returning from the surface of the object;
• a detector for detecting the light signals;
• a processor for digitizing and processing the detected light signals;
• and
• a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler comprising a housing having two opposed reflection surfaces and an optical opening located in the detection beam path of the returning light,
• wherein the returning light is alternately reflected, according to an angle of incidence of the returning light, along the two opposed reflection surfaces, each defining at least one pin hole therethrough located at a respective focal point of the returning light for masking out a portion of the returning light associated with the respective focal point.

A system for the simultaneous polyfocal imaging of a surface profile of any object, comprising:

• a light source for illuminating the object;
• at least one optical element for focusing light signals returning from the surface of the object;
• a detector for detecting the light signals;
• a processor for digitizing and processing the detected light signals;
• and
• a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler having a polygonal shape and a plurality of reflecting surfaces arranged at predetermined angles relative to one another, each of the reflecting surfaces having at least one pin hole.

A system for the simultaneous polyfocal imaging of a surface profile of any object, comprising:

• a light source for illuminating the object;
• at least one optical element for focusing light signals returning from the surface of the object;
• a detector for detecting the light signals;
• a processor for digitizing and processing the detected light signals;
• and
• a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler defining a plurality of slits located alongside one another for parallel detection of x- and z-coordinates of the returning light to permit simultaneous detection of several image points in one focal plane.

A method for simultaneous polyfocal imaging of the surface profile of any desired objects, comprises:

• providing an arrangement including a light source for illuminating the object, at least one optical element for focusing light signals returning from the surface of the object, a detector for detecting the light signals, a processor for digitizing and processing the detected light signals, and a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler being configured as an arrangement of pin holes in series, each located at a focal point, a portion of the light returning from the different image planes being masked out at a pin hole located at the focal point of that portion of the light, and the light remaining being reflected to the next-in-series pin hole;
• outputting from the detection beam path the light returning from different image planes in a region downstream of the optics and upstream of the detector;
• and
• supplying the output light to the detector.

A method for simultaneous polyfocal imaging of the surface profile of any desired objects, comprises:

• providing an arrangement including a light source for illuminating the object, at least one optical element for focusing light signals returning from the surface of the object, a detector for detecting the light signals, a processor for digitizing and processing the detected light signals, and a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler comprising a housing having two opposed reflection surfaces and an optical opening located in the detection beam path of the returning light,
• wherein the returning light is alternately reflected, according to an angle of incidence of the returning light, along the two opposed reflection surfaces, each defining at least one pin hole therethrough located at a respective focal point of the returning light for masking out a portion of the returning light associated with the respective focal point;
• outputting from the detection beam path the light returning from different image planes in a region downstream of the optics and upstream of the detector;
• and
• supplying the output light to the detector.

A method for simultaneous polyfocal imaging of the surface profile of any desired objects, comprises:

• providing an arrangement including a light source for illuminating the object, at least one optical element for focusing light signals returning from the surface of the object, a detector for detecting the light signals, a processor for digitizing and processing the detected light signals, and a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler having a polygonal shape and a plurality of reflecting surfaces arranged at a predetermined angle relative to one another, each of the reflecting surfaces having at least one pin hole;
• outputting from the detection beam path the light returning from different image planes in a region downstream of the optics and upstream of the detector;
• and
• supplying the output light to the detector.

A method for simultaneous polyfocal imaging of the surface profile of any desired objects, comprises:

• providing an arrangement including a light source for illuminating the object, at least one optical element for focusing light signals returning from the surface of the object, a detector for detecting the light signals, a processor for digitizing and processing the detected light signals, and a beam output coupler for simultaneously separating light returning from different image planes of the object and feeding the separated light to the detector, the beam output coupler being arranged in the detection beam path downstream of the optical element, the beam output coupler defining a plurality of slits located alongside one another for parallel detection of x- and z-coordinates of the returning light to permit simultaneous detection of several image points in one focal plane;
• outputting from the detection beam path the light returning from different image planes in a region downstream of the optics and upstream of the detector;
• and
• supplying the output light to the detector.