Energy filter and electron microscope equipped with the energy filter
AssigneeHitachi, Ltd.
InventorsKoji Kimoto, Yoshifumi Taniguchi, Shunroku Taya, Shigeto Isakozawa, Takashi Aoyama, Masakazu Saito, Tomoko Sekiguchi
Life of this patent
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Abstract
An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.
Claims15
An energy filter in which electrons emitted from a crossover plane form an energy dispersion plane, the electrons emitted from an entrance image plane form an achromatic image plane, and an average track of an electron beam is symmetric with respect to a symmetric plane, wherein a normal line to said symmetric plane is inclined to an incident direction of the electron beam at an angle of .theta. and the angle .theta. is in a range of 0.degree.<.theta.<180.degree..
An energy filter which comprises at least one electron spectrometer and has a course of curved axis of an electron beam which is symmetric with respect to a symmetric plane, wherein a normal line to said symmetric plane is inclined to an incident direction of the electron beam at an angle of .theta. and the angle .theta. is in a range of 0.degree.<.theta.<180.degree..
Dependencies are inferred from the claim text.