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US 6,150,549 AGranted
Silane compound
AssigneeNippon Mitsubishi Oil Corporation
InventorsMasaki Minami, Keizo Ikai, Mitsuo Matsuno
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Abstract
A novel silane compound is disclosed, which is used as a suitable strating material (monomer) of polysilane eligible for the precursor of electroconductive- and photoconductive-materials such as phtoresists as well as polymerization initiators and silicone carbide-based ceramics and which is useful for chemical vapor deposition.
Claims4
A silane compound represented by the formula
- X.sub.3 Si--Q (I)
- wherein X is a hydrogen atom or a halogen atom, Q is selected from a group represented by the formula ##STR20## wherein R is a methyl or ethyl group and may be the same or different, and a group represented by the formula ##STR21## wherein R.sup.1 is a hydrogen atom or a C.sub.1 -C.sub.4 alkyl group, R.sup.2 is a C.sub.1 -C.sub.4 alkyl group and n is an integer of 1 or 2, provided that R.sup.1 is not an hydrogen atom if R.sup.2 is a methyl group and n is 2 or R.sup.2 is a methyl group and X in formula (I) is a halogen atom.
Dependencies are inferred from the claim text.