Apparatus for forming materials
AssigneeMicron Technology, Inc.
InventorRandhir P. S. Thakur
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Abstract
Semiconductor fabrication methods for processing materials on a semiconductor wafer are disclosed. An exemplary method the semiconductor fabrication apparatus comprises processing a material on a semiconductor assembly during semiconductor fabrication, by the steps of: precleaning a semiconductor assembly in ultraviolet radiation, the step of precleaning performed prior to the step of forming; forming a film in ultraviolet radiation and infrared radiation; annealing the film ultraviolet light radiation and infrared radiation.
Claims7
A method for depositing a film on a semiconductor wafer comprising:
- preheating a source gas in a preheating chamber comprising a first ultraviolet radiation source and a first infrared radiation source;
- depositing said film on said wafer by presenting said source gas to said wafer, said step of depositing occurs during the emission of ultraviolet rays;
- annealing said film using ultraviolet rays;
- wherein said ultraviolet rays are emitted from a second ultraviolet radiation source and a second infrared radiation source, said second radiation sources axisymmetrically arranged about a central location within a fabrication chamber so that the emitted radiation is substantially uniform throughout said chamber, said emitted radiation from said ultraviolet radiation source has an unobstructed path to said semiconductor wafer.
A method for depositing a film on a semiconductor wafer comprising:
- depositing said film on said wafer, said step of depositing occurs during the emission of ultraviolet rays;
- annealing said film using ultraviolet rays;
- wherein said ultraviolet rays are emitted from an ultraviolet radiation source and an infrared radiation source, said second radiation sources axisymmetrically arranged about a central location within a fabrication chamber so that the emitted radiation is substantially uniform throughout said chamber, said emitted radiation from said ultraviolet radiation source has an unobstructed path to said semiconductor wafer.
A method for annealing a film on a semiconductor wafer comprising:
- heating said film using ultraviolet rays, wherein said ultraviolet rays are emitted from an ultraviolet radiation source and an infrared radiation source, said radiation sources axisymmetrically arranged about a central location within a fabrication chamber so that the emitted radiation is substantially uniform throughout said chamber, said emitted radiation from said ultraviolet radiation source has an unobstructed path to said semiconductor wafer.
Dependencies are inferred from the claim text.