Row electrode anodization
AssigneeCandescent Technologies Corporation
InventorKishore K. Chakravorty
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Abstract
A structure and method for forming an anodized row electrode for a field emission display device. In one embodiment, the present invention comprises depositing a resistor layer over portions of a row electrode. Next, an inter-metal dielectric layer is deposited over the row electrode. In the present embodiment, the inter-metal dielectric layer deposited over portions of the resistor layer and over pad areas of the row electrode. After the deposition of the inter-metal dielectric layer, the row electrode is subjected to an anodization process such that exposed regions of the row electrode are anodized. In so doing, the present invention provides a row electrode structure which is resistant to row to column electrode shorts and which is protected from subsequent processing steps.
Claims7
In a field emission display device, a method for protectively processing a row electrode comprising the steps of:
- a) depositing a resistor layer of an electrode portion of a field emission display device over portions of said row electrode of said electrode portion of said field emission display device,
- b) depositing an inter-metal dielectric layer of an electrode portion of a field emission display device over said row electrode, said inter-metal dielectric layer deposited over portions of said resistor layer and over pad areas of said row electrode;
- and
- c) subjecting said row electrode, having said resistor layer and said inter-metal dielectric layer disposed thereover, to an anodization process such that exposed regions of said row electrode are anodized.
Dependencies are inferred from the claim text.