Polishing apparatus and polishing method
AssigneeKabushiki Kaisha Toshiba
InventorMasaaki Sudou
Life of this patent
Estimating the term…
Abstract
A polishing apparatus comprises holding means for holding an object with the surface to be polished being exposed, first driving means for pressing the holding means against the polishing cloth with variable pressing force and rotating the holding means. It also comprises a guide ring body, provided around the holding means and independent of rotation of the holding means, a lower end of the guide ring body being brought into contact with the polishing cloth. It further comprises second driving means for pressing the guide ring body against the polishing cloth with variable pressing force and rotating the guide ring body independent of rotation of the holding means.
Claims6
A polishing apparatus for polishing an object said apparatus comprising:
- a polisher attached to a table;
- a holder for holding the object;
- a first driver for pressing the holder against the polisher with a variable pressing force and rotating the holder;
- a guide ring body, provided around the holder and rotated independently of the holder, the guide ring body having a lower end;
- and
- a second driver for pressing the guide ring body against the polisher with a variable pressing force and separately rotating the guide ring body relative to the rotation of the holder.
A polishing method for polishing an object held by a holder comprising the steps of:
- pressing the object against a polisher arranged opposite to a surface of the object to be polished;
- rotating the holder relatively to the polisher;
- and rotating a guide ring body, the guide ring body, which has a lower end with a space arranged in order to pass a polishing solution, being provided around the holder, and being rotated at a rotation rate different from that of the holder.
Dependencies are inferred from the claim text.