Getter pump with high gas sorption velocity
AssigneeSaes Getters S.P.A.
InventorAndrea Conte
Life of this patent
Estimating the term…
Abstract
A getter pump with high gas sorption velocity includes a cylindrical housing that has an open end and a closed end and defines a chamber with a central axis. Three to eight getter structures are disposed within the chamber. The getter structures are symmetrically arranged around the central axis of the chamber and are substantially parallel to the central axis of the chamber. Each of the getter structures includes a plurality of porous disks of getter material disposed on a central shaft. A heater is centrally disposed within the chamber such that the heater is substantially coaxial with the central axis of the chamber.
Claims25
A getter pump with high gas sorption velocity, comprising:
- a cylindrical housing having an open end and a closed end, said housing defining a chamber with a central axis;
- three to eight getter structures disposed within said chamber, said getter structures being symmetrically arranged around said central axis of said chamber and substantially parallel to said central axis of said chamber, each of said getter structures being comprised of a plurality of porous disks of getter material disposed on a central shaft;
- and
- a heater centrally disposed within said chamber, said heater being substantially coaxial with said central axis of said chamber.
A getter pump with high gas sorption velocity, comprising:
- a housing comprising a tubular section having a flange at each end thereof and a base fastened to said flange at one end of said tubular section, said housing defining a chamber with a central axis;
- three to eight getter structures disposed within said chamber, said getter structures being symmetrically arranged around said central axis of said chamber and substantially parallel to said central axis of said chamber, each of said getter structures being comprised of a plurality of porous disks of getter material disposed on a metal shaft;
- and
- a heater centrally disposed within said chamber, said heater being substantially coaxial with said central axis of said chamber.
Dependencies are inferred from the claim text.