End effector assembly for inclusion in a system for producing uniform deposits on a wafer

In combination in an end effector for transferring a substrate between a cassette module and a process module, the substrate having a central portion for receiving a deposition material and having a peripheral portion on which no material is to be deposited,

• a body,
• a web extending from the body,
• means operatively coupled to the body and the web for holding the web in a rigidified relationship to the body,
• the body and the web being constructed and disposed relative to each other to hold the substrate on the body and the web with the peripheral portion of the substrate supported at one end on the body and at an opposite end on the web and with no contact of the central portion of the substrate with the body or the web,
• a robotic assembly including a plurality of arms pivotable relative to one another to define contracted and expanded relationships, the robotic assembly being operatively coupled to the body,
• the body, the web and the robotic assembly being disposed in a transport module between the cassette module and the process module,
• means for providing a rotation of the body, the web and the robotic assembly to face the robotic assembly toward a selective one of the cassette module and the process module, and
• means for pivoting the arms in the robotic assembly between the contracted and expanded relationships with the robotic assembly facing the selective one of the cassette module and the process module,
• the web including a panel and first and second flanges respectively disposed at opposite ends of the panel,
• the first flange being operatively coupled to the body,
• the second flange being displaced from the body,
• the body and the second flange being constructed and disposed relative to each other to support the substrate at the peripheral portions of the substrate without any contact of the body and the second flange with the central portion of the substrate,
• the second flange having a transverse relationship to the panel,
• the body having a ledge,
• the substrate being disposed at opposite ends on the ledge and on the second flange without any contact of the substrate with the central portion of the substrate.

In combination in an end effector for transferring a substrate between a cassette module and a process module, the substrate having a central portion for receiving a deposition material and having a peripheral portion on which no material is to be deposited,

• a body,
• a web extending from the body,
• means operatively coupled to the body and the web for holding the web in a rigidified relationship to the body,
• the body and the web being constructed and disposed relative to each other to hold the substrate on the body and the web with the peripheral portion of the substrate supported at one end on the body and at an opposite end on the web and with no contact of the central portion of the substrate with the body or the web,
• a robotic assembly including a plurality of arms pivotable relative to one another to define contracted and expanded relationships, the robotic assembly being operatively coupled to the body,
• the body, the web and the robotic assembly being disposed in a transport module between the cassette module and the process module,
• means for providing a rotation of the body, the web and the robotic assembly to face the robotic assembly toward a selective one of the cassette module and the process module, and
• means for pivoting the arms in the robotic assembly between the contracted and expanded relationships with the robotic assembly facing the selective one of the cassette module and the process module,
• the web including a panel and first and second flanges respectively disposed at opposite ends of the panel,
• the first flange being operatively coupled to the body,
• the second flange being displaced from the body,
• the body and the second flange being constructed and disposed relative to each other to support the substrate at the peripheral portion of the substrate without any contact of the body and the second flange with the central portion of the substrate,
• rods extending through the first and second flanges at spaced lateral positions to rigidify the panel and provide for a support of the substrate by the web.