Integrated electrically operable micro-valve
AssigneeRedwood Microsystems, Inc.
InventorsJames M. Harris, Bradford A. Cozad, Dean Allyn Hopkins, Jr., John S. Fitch
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Abstract
Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device having a sealed cavity with a flexible wall. The sealed cavity contains a fluid that expands and contracts as it is heated or cooled, thus causing the flexible wall to move. Movement of this wall or membrane is used to move a valve element and dynamically control the opening or closing of a valve port over a predetermined range.
Claims12
A micro-valve, comprising:
- a fluid guiding structure containing a fluid inlet port and a fluid outlet port;
- a fluid communication channel, formed within said fluid guiding structure, fluidically coupling said fluid inlet port to said fluid outlet port;
- an intermediary port, formed within said fluid communication channel, said fluid inlet port being fluidically coupled to said fluid outlet port valve through said intermediary port;
- a valve element, moveably positioned proximate to said intermediary port within said fluid communication channel;
- an energy conversion body defining a chamber enclosing a working fluid, said energy conversion body being at least partially formed of a semiconductor material, said energy conversion body including a flexible membrane mechanically coupled to said valve element;
- and
- a heater positioned within said chamber of said energy conversion body, said heater being positioned on a suspension structure that places said heater at approximately the center of said chamber, said heater selectively controlling the volume occupied by said working fluid, thereby providing for movement of said valve element in response to said flexible membrane to control fluid passage through said intermediary port.
A micro-valve, comprising:
- a fluid guiding structure containing a fluid inlet port and a fluid outlet port;
- a fluid communication channel, formed within said fluid guiding structure, fluidically coupling said fluid inlet port to said fluid outlet port;
- an intermediary port, formed within said fluid communication channel, said fluid inlet port being fluidically coupled to said fluid outlet port valve through said intermediary port;
- a valve element, moveably positioned proximate to said intermediary port within said fluid communication channel;
- an energy conversion body defining a chamber enclosing a working fluid, said energy conversion body being at least partially formed of a semiconductor material, said energy conversion body including a flexible membrane mechanically coupled to said valve element;
- and
- a thermal control unit positioned on top of said energy conversion body, said thermal control unit selectively controlling the volume occupied by said working fluid, thereby providing for movement of said valve element in response to said flexible membrane to control fluid passage through said intermediary port.
Dependencies are inferred from the claim text.