Automated processing liquid drain system
AssigneeVanguard International Semiconductor Corporation
InventorsJyh-Yeong Tsay, Yung-Cheng Chen
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Abstract
The present invention discloses an automated processing liquid drain system that utilizes a series of processing liquid drain tanks and at least two waste collection tanks that are in fluid communication with the processing liquid drain tanks such that when a high liquid level sensor mounted on the drain tank is activated, the spent processing liquid collected from processing machines can be transferred to one of the waste collection tanks and thus preventing overflow in the processing liquid drain tanks.
Claims20
A processing liquid drain system comprising:
- a first processing liquid drain tank positioned in close proximity to a process machine for collecting spent processing liquid,
- a second processing liquid drain tank in fluid communication with and situated below said first processing liquid drain tank by a first conveying means,
- said second processing liquid drain tank is equipped with at least one high liquid level sensing means for triggering by said spent processing liquid and for flowing said spent processing liquid through a second conveying means into a waste collection tank, and
- at least two waste collection tanks in fluid communication with said second processing drain tank by said second conveying means for accepting said spent processing liquid from said second processing liquid drain tank when said at least one high level sensing means is triggered.
An automated processing liquid drain system comprising:
- a first liquid holding tank positioned in close proximity to a process machine for collecting spent processing liquid from the machine,
- a second liquid holding tank in fluid communication with said first liquid holding tank and is equipped with a high liquid level sensor and a low liquid level sensor for triggering by said spent processing liquid, and
- a first pump means in fluid communication with and positioned inbetween said second liquid holding tank and said at least one waste collection tank for delivering said spent processing liquid from said second liquid holding tank to said at least one waste collection tank when a high liquid level is said second liquid holding tank is detected by said high liquid level sensor and said first pump means is activated.
A method for draining spent processing liquid from a process machine comprising the steps of:
- collecting spent processing liquid into a first holding tank positioned in close proximity to the process machine,
- flowing the spent processing liquid from said first holding tank into a second holding tank positioned at a level lower than said first holding tank through a first conduit, said second holding tank being equipped with a high liquid level sensor for detecting a fluid level of said spent processing liquid,
- connecting said second holding tank in fluid communication to at least one waste collection tank through a pump and a valve, and
- flowing said spent processing liquid to said at least one waste collection tank through a second conduit when a high liquid level of said spent processing liquid is detected by said high liquid level sensor.
Dependencies are inferred from the claim text.