Process control system using feed forward control threads based on material groups

A process control system comprising:

• a plurality of process tools linked in a process flow;
• a database coupled to the plurality of process tools;
• a processor operatively coupled to the plurality of process tools and to the database, the processor including a program storage;
• a software control program for loading into the program storage and executing the processor, the software control program including:
• a configuration routine defining a plurality of process control variables that are known to cause a variability in results of processing and associating the plurality of process control variables with processing of a material sample;
• a processing control routine controlling ones of the plurality of process tools during processing of the material sample;
• a feed-forward routine that updates process control variables for subsequent processing operations based on results of completed processing operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics;
• and
• a tagging routine applying a set of rules to the plurality of process control variables, the rules being associated with the material sample processing, the rules determining a tag identifying the processed material sample.

A process control system comprising:

• a tag process that issues an identification associating a material to a material group;
• a lookup setup parameters process coupled to the tag process, the lookup setup parameters process that determines setup parameters for the material group;
• an accumulator coupled to the lookup setup parameters process, the accumulator that updates parameters of the material group and generates an additional material group when the updated parameters are substantially changed;
• a material process coupled to the accumulator, the material process that processes the material according to the updated parameters;
• a material results process coupled to the material process, the material results process that measures changes in the material resulting from application of the material process;
• and
• a feed-forward process that updates the parameters for subsequent material process operations based on material results of completed process operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics.

A process control system comprising:

• a plurality of feed-forward control threads that account and adjust for variability of processing in a process flow including a plurality of machines, machine configurations, and machine setups;
• a routine that initializes processing parameters of the plurality of feed-forward control threads for a specified material group;
• a routine that determines results of processing of a step in the process flow;
• a routine that updates processing parameters for subsequent steps in the process flow based on the results;
• and
• a routine that feeds the updated processing parameters forward to the plurality of machines, machine configurations, and machine setups for usage in the subsequent steps in the process flow.

A process control system comprising:

• a plurality of feed-forward control threads that account and adjust for variability of processing in a process flow including a plurality of machines, machine configurations, and machine setups;
• a routine that initializes processing parameters of the plurality of feed-forward control threads for the material groups;
• a routine that tags the material groups;
• a routine that determines results of processing of a step in the process flow;
• a routine that updates processing parameters for subsequent steps in the process flow based on the results to manage materials having different process characteristics in the process flow by supplying information to assist sorting of materials based on a manufacturing signature;
• and
• a routine that feeds the updated processing parameters forward to the plurality of machines, machine configurations, and machine setups for usage in the subsequent steps in the process flow.