Multi-temperature control system and fluid temperature control device applicable to the same system

A multi-temperature control system for controlling temperature of a plurality of places using circulation of a working fluid, comprising:

• a plurality of temperature control machines each assigned to each of the places individually;
• and wherein:
• each of the temperature control machines has a pair of fluid circulation pipes for circulating the working fluid for exclusive use of each of the places, and controls temperature of the working fluid within the pair of the fluid circulation pipes individually;
• a plurality of the places or a plurality of portions of each of the process chambers provided for a reaction processing process;
• and
• each of the temperature control machines is arranged in the vicinity of each of the plurality of portions of each of the process chambers.

A multi-temperature control system for controlling temperature at a plurality of places using circulation of a working fluid, comprising:

• a plurality of fluid temperature control devices for controlling a temperature of the working fluid, each of said plurality of fluid temperature control devices being individually assigned to one of said plurality of places, each of said plurality of said fluid temperature control devices including:
• a transparent cylinder;
• a lamp arranged with said transparent cylinder, for radiating infrared rays;
• a cylindrical vessel arranged so as to surround said transparent cylinder and having an inner space between said transparent cylinder and said cylindrical vessel;
• a fluid inlet port for passing a fluid into the inner space;
• a fluid outlet port for passing the fluid from the inner space;
• and
• inner fins arranged in the inner space in contact with an inner circumferential surface of said cylindrical vessel.

A multi-temperature control system for controlling temperature at a plurality of places using circulation of a working fluid, comprising:

• at least one fluid temperature control device for controlling a temperature of the working fluid, said fluid temperature control device including:
• a transparent cylinder;
• a lamp arranged within said transparent cylinder, for radiating infrared rays;
• a cylindrical vessel arranged so as to surround said transparent cylinder and having an inner space between said transparent cylinder and said cylindrical vessel;
• a fluid inlet port for passing a fluid into the inner space;
• a fluid outlet port for passing the fluid from the inner space;
• and
• inner fins arranged in the inner space in contact with an inner circumferential surface of said cylindrical vessel;
• and
• wherein said fluid temperature control device further including:
• an outer cylinder arranged so as to surround said cylindrical vessel and having an outer space between said cylindrical vessel and said outer cylinder;
• a cooling liquid inlet port for passing a cooling liquid into the outer space;
• and
• a cooling liquid outlet port for passing the cooling liquid from the outer space.

A reaction processing apparatus provided with a plurality of process chambers at which temperature is to be controlled using circulation of a working fluid, comprising:

• a plurality of fluid temperature control devices for controlling a temperature of the working fluid, each of said plurality of fluid temperature control devices being individually assigned to one of said plurality of process chambers, each of said plurality of said fluid temperature control devices including:
• a transparent cylinder;
• a lamp arranged within said transparent cylinder, for radiating infrared rays;
• a cylindrical vessel arranged so as to surround said transparent cylinder and having an inner space between said transparent cylinder and said cylindrical vessel;
• a fluid inlet port for passing a fluid into the inner space;
• a fluid outlet port for passing the fluid from the inner space;
• and
• inner fins arranged in the inner space in contact with an inner circumferential surface of said cylindrical vessel.

A reaction processing apparatus provided with process chambers at which temperature is to be controlled using circulation of a working fluid, comprising:

• at least one fluid temperature control device for controlling a temperature of the working fluid, said fluid temperature control device including:
• a transparent cylinder;
• a lamp arranged within said transparent cylinder, for radiating infrared rays;
• a cylindrical vessel arranged so as to surround said transparent cylinder and having an inner space between said transparent cylinder and said cylindrical vessel;
• a fluid inlet port for passing a fluid into the inner space;
• a fluid outlet port for passing the fluid from the inner space;
• and
• inner fins arranged in the inner space in contact with an inner circumferential surface of said cylindrical vessel;
• and
• wherein said fluid temperature control device further including:
• an outer cylinder arranged so as to surround said cylindrical vessel and having an outer space between said cylindrical vessel and said outer cylinder;
• a cooling liquid inlet port for passing a cooling liquid into the outer space;
• and
• a cooling liquid outlet port for passing the cooling liquid from the outer space.