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US 6,147,821 AGranted
Penta prism mask
AssigneeCanon Kabushiki Kaisha
InventorsSusumu Kadokura, Naoya Saitoh, Tomoaki Kato
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Abstract
A penta prism mask havimg having an antireflective coating film on its surface, the antireflective coating film being an electrodeposition coating film formed by electrophoretic deposition using an electrodeposition paint comprising a dispersion of a resin and fine particles.
Claims31
A penta prism mask comprising:
- a mask surface;
- and
- an antireflective coating film formed on said mask surface, said antireflective coating film including an electrodeposition coating film formed by co-depositing by electrophoretic deposition an electrodeposition paint including a dispersion of a resin and fine particles.
A method of forming a penta prism mask, comprising the steps of:
- dispersing fine particles and a resin in an electrodeposition paint;
- and
- forming on a mask substrate by co-deposition an antireflective coating film having an electrodeposition coating film formed by the electrodeposition paint including the dispersion of resin and fine particles.
Dependencies are inferred from the claim text.