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US 6,147,789 AGranted
High speed deformable mirror light valve
OwnerDaniel Gelbartinventor
Life of this patent
Estimating the term…
Abstract
A deformable mirror light valve comprised of an array of silicon nitride ribbons, metalized to reflect light. Each ribbon is electrostatically deformed to form a cylindrical mirror. Each deformable ribbon modulates the light of one pixel by focusing the reflected light through a slit. An alternative embodiment focuses the light onto a stop. The ribbon structure has a fast response time combined with high contrast.
Claims9
A light valve comprising:
- a plurality of individually addressable and micro-machined ribbons of silicon nitride each forming an energizable capacitor which may be selectively deformed into an approximately cylindrical form;
- a mirror surface formed on each silicon nitride ribbon, said mirror surface having a focus which changes in accordance with the deformation of said eneraizable capacitor;
- a target surface remote from the mirror surfaces;
- and
- an aperture, positioned between the mirror surfaces and the target surface, for converting the change in focus of each mirror surface into a light intensity change;
- and
- a source of electrical energy coupled to and configured to selectively energize and deform each capacitor.
4 more elements
A method of forming a high speed deformable mirror light valve comprising the acts of:
- (1) forming a ribbon including an electrically conductive surface on a silicon nitride surface, the ribbon having first and second ends;
- (2) supporting the ribbon at its first and second ends;
- (3) deforming the ribbon into a mirror having an approximately cylindrical shape by applying an electrical signal to the conductive surface;
- (4) providing a source of light reflected by said mirror;
- (5) placing an element including transparent and nontransparent areas in a manner that converts said deformation of said mirror into changes of intensity of said reflected light at approximately the focal point of the mirror.
2 more elements
Dependencies are inferred from the claim text.