Drive device using electromechanical transducer and apparatus equipped with the device

A drive device comprising:

• a member assembly;
• an electromechanical transducer;
• a drive member, fixedly coupled to the electromechanical transducer, being frictionally coupled to the member assembly;
• a drive controller for providing a drive signal to the electromechanical transducer, the drive signal controlling the electromechanical transducer to actuate the drive member and thereby adjust a relative position between the member assembly and the drive member;
• a state sensor for measuring an environmental state, and for providing to the drive controller a state signal corresponding to the environmental state;
• a position detector for detecting a position of the member assembly relative to the drive member, and for providing to the drive controller a position signal corresponding to such;
• and
• a correction data storage device for storing predetermined correction data, and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust the relative position between the member assembly and the drive member based on both the state signal provided by the state sensor and the position signal provided by the position detector.

A precision measuring device for measuring an attribute of a sample, the device comprising:

• an enclosure in which an environmental state can arbitrarily be set;
• a movable sample table positioned within the enclosure to receive a sample for measuring;
• a movement mechanism, fixedly coupled to the sample table, to selectively effect a movement of the sample table, the movement mechanism including:
• a member assembly;
• an electromechanical transducer;
• and
• a drive member, fixedly coupled to the electromechanical transducer, being frictionally coupled to the member assembly;
• a drive controller for providing a drive signal to the electromechanical transducer, the drive signal controlling the electromechanical transducer to drive the drive member, and thereby adjust a relative position of the sample table;
• a state sensor for measuring the environmental state and for providing to the drive controller a state signal corresponding the environmental state;
• and
• a correction data storage device for storing predetermined correction data and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust the relative position of the sample table based on the state signal provided by the state sensor.

A precision measuring device for measuring an attribute of a sample, the device comprising:

• an enclosure in which an environmental state can arbitrarily be set;
• a movable sample table positioned within the enclosure to receive a sample for measuring;
• a movement mechanism, fixedly coupled to the sample table, to selectively effect a movement of the sample table, the movement mechanism including:
• a member assembly;
• an electromechanical transducer;
• and
• a drive member, fixedly coupled to the electromechanical transducer, being frictionally coupled to the member assembly;
• a drive controller for providing a drive signal to the electromechanical transducer, the drive signal controlling the electromechanical transducer to drive the drive member, and thereby adjust a relative position of the sample table;
• a state sensor for measuring the environmental state and for providing to the drive controller a state signal corresponding to the environmental state;
• a position detector for detecting the relative position of the sample table, and for providing to the drive controller a position signal corresponding to the relative position of the sample table;
• and
• a correction data storage device for storing predetermined correction data and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust the relative position of the sample table based on the state signal provided by the state sensor.

An apparatus having a drive device, said apparatus comprising:

• a driven member;
• a drive member comprising an electromechanical transducer, the drive member being capable of moving the driven member by elongation and contraction of the electromechanical transducer and a frictional coupling;
• a drive controller for providing a drive signal to the electromechanical transducer, said drive signal effecting elongation and contraction by the electromechanical transducer to move the driven member;
• a state sensor for measuring an environmental state, and for providing to the drive controller a state signal corresponding to the environmental state;
• and
• a correction data storage device for storing predetermined correction data, and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust a position of the driven member, based on the state signal provided by the state sensor.

An apparatus having a drive device, said apparatus comprising:

• a driven member;
• a drive member comprising an electromechanical transducer, the drive member being capable of moving the driven member by elongation and contraction of the electromechanical transducer and by a frictional coupling;
• a drive controller for providing a drive signal to the electromechanical transducer, said drive signal effecting elongation and contraction by the electromechanical transducer to move the driven member;
• a state sensor for measuring an environmental state, and for providing to the drive controller a state signal corresponding to the environmental state;
• a position detector for detecting a position of the driven member, and for providing to the drive controller a position signal corresponding to the relative position of the driven member;
• and
• a correction data storage device for storing predetermined correction data, and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust the relative position of the driven member based on the state signal provided by the state sensor.

An electron microscope comprising:

• an enclosure in which an environmental state can arbitrarily be set;
• a movable sample table, positioned within the enclosure, for receiving a sample;
• a drive member comprising an electromechanical transducer, the drive member being capable of moving the sample table by elongation and contraction of the electromechanical transducer and by a frictional coupling;
• a drive controller for providing a drive signal to the electromechanical transducer, said drive signal effecting elongation and contraction by the electromechanical transducer to move the sample table;
• a state sensor for measuring an environmental state, and for providing to the drive controller a state signal corresponding to the environmental state;
• and
• a correction data storage device for storing predetermined correction data, and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust a position of the sample table based on the state signal provided by the state sensor.

An electron microscope comprising:

• an enclosure in which an environmental state can arbitrarily be set;
• a movable sample table, positioned within the enclosure, for receiving a sample;
• a drive member comprising an electromechanical transducer, the drive member being capable of moving the sample table by elongation and contraction of the electromechanical transducer and by a frictional coupling;
• a drive controller for providing a drive signal to the electromechanical transducer, said drive signal effecting elongation and contraction by the electromechanical transducer to move the sample table;
• a state sensor for measuring an environmental state, and for providing to the drive controller a state signal corresponding to the environmental state;
• a position detector for detecting a position of the sample table, and for providing to the drive controller a position signal corresponding to the position of the sample table;
• and
• a correction data storage device for storing predetermined correction data, and for providing the predetermined correction data to the drive controller, wherein the predetermined correction data can be used by the drive controller to adjust the position of the sample table based on the state signal provided by the state sensor.