US 6,147,372 AGranted

Layout of an image sensor for increasing photon induced current

AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.

InventorsHua-Yu Yang, Chih-Heng Shen, Wen-Cheng Chang

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Abstract

Device layouts are described which increase the photon current of a metal oxide semiconductor image sensor. The metal oxide semiconductor can be NMOS, PMOS, or CMOS. The key part of the photon current of the image sensors comes from the depletion region at the PN junction between the drain region and the substrate material. The layouts used significantly increase the area of this depletion region illuminated by a stream of photons. The layouts have a drain region which takes the shape of a number of parallel fingers perpendicular to the gate electrode, a number of parallel fingers parallel to the gate electrode, or a spiral. The drain regions of these layouts significantly increase the area of the drain depletion region illuminated by a stream of electrons.

Claims21

Dependent claims

An image sensor, comprising:

a semiconductor substrate having a first polarity;
a layer of gate oxide formed on said semiconductor substrate;
a gate electrode having a first edge and a second edge;
a first region formed in said semiconductor substrate, wherein said first region is doped to have a polarity opposite the polarity of said semiconductor substrate, said first region has a base segment and a plurality of fingers, said base segment of said first region is parallel to said first edge of said gate electrode, each of said fingers has two parallel sides and two parallel ends, said parallel sides of each of said fingers are parallel to each other and perpendicular to said base segment, one of said ends of each of said fingers contacts said base segment, and both of said parallel sides and one of said parallel ends of each of said fingers contacts a part of said semiconductor substrate having said first polarity;
and
a second region formed in said semiconductor substrate, wherein said second region is doped to have a polarity opposite the polarity of said semiconductor substrate, and said gate electrode is located between said first region and said second region.

3 more elements

Dependencies are inferred from the claim text.