Superconducting device and a method of manufacturing the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsAkihiro Odagawa, Hideaki Adachi, Kentaro Setsune
Life of this patent
Estimating the term…
Abstract
This invention provides a superconducting device with good characteristics that can be reproduced at an arbitrary place on a substrate and a method of manufacturing the same. A convex region (a processed, linearly-shaped platinum thin film) of oriented metal is provided on a substrate as a gate electrode. Then, an oxide insulating film (SrTiO.sub.3 thin film) is deposited on the convex region, and further a YBa.sub.2 Cu.sub.3 O.sub.7 oxide superconducting thin film is deposited on the oxide insulating film. Accordingly, a grain boundary part is formed on the convex region. A drain electrode and a source electrode are formed facing each other with the grain boundary part in between.
Claims18
A superconducting device comprising a substrate, a convex region formed on said substrate, an oxide film on said convex region and an oxide superconducting film formed on said oxide film, wherein said convex region is a truncated pyramid, wherein each side face of said truncated pyramid has a slope.
Dependencies are inferred from the claim text.