US 6,147,354 A · Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ionization gap

Abstract

A universal cold-cathode type ion source with closed-loop electron drifting and with ion-beam propagation direction perpendicular to the plane of electron drifting is intended for uniformly treating stationary or moveable objects. Treatment procedures include cleaning, activation, polishing, thin-film coating, or etching. The ion source of the invention allows for adjusting beam parameters and configurations and has an adjustable dimensions of the ionization space between the anode and the cathode. In a preferred embodiment, the adjustment is carried out by moving the anode with respect to the cathode. The moveable anode is shifted in the direction of propagation of the ion beam or in the opposite direction, whereby the tubular ion beam is either converged or diverged. As a result, it becomes possible to adjust the surface area being treated and characteristics of the ion beam such as average energy of ions in the beam and composition of the beam, in case of a multiple-component working medium.

Claims16

Dependent claims

A universal ion beam source with a closed-loop ion-emitting slit capable of emitting an ion beam toward an object located in a position reachable by said ion beam, comprising:

hollow housing means that function as a cathode of said ion beam source;
anode means located in said hollow housing means and spaced from said cathode at an anode-cathode distance to form an ionization gap therebetween for ionization and acceleration of ions formed in said gap during operation of said ion beam source;
magnetic field generating means in mangetoconductive relationship with said anode means and said cathode for forming a closed magnetoconductive circuit passing through said anode means, said ionization gap, said cathode, and said magnetic field generating means;
a closed-loop ion-emitting slit formed in said cathode in the path of said magnetoconductive circuit, said closed-loop ion-emitting slit having predetermined geometric dimensions;
electric power supply means for maintaining said anode means under a positive charge and said cathode under a negative charge;
means for the supply of a working medium into said hollow housing of said cathode means to form an ion beam when said working medium passes through said ionization gap, said beam having a direction of propagation towards said object;
and
means for moving said anode with respect to said cathode in said direction of propagation for adjusting said anode-cathode distance and thus adjusting said performance characteristics of said ion beam source.

5 more elements

A universal ion beam source with a closed-loop ion-emitting slit capable of emitting an ion beam toward an object located in a position reachable by said ion beam, comprising:

hollow housing means that function as a cathode of said ion beam source;
anode of a closed-loop configuration located in said hollow housing means and spaced from said cathode at an anode-cathode distance to form an ionization gap therebetween for ionization and acceleration of ions formed in said gap during operation of said ion beam source;
a permanent magnet fixed in said hollow housing in magnetoconductive relationship with said anode and said cathode for forming a closed magnetoconductive circuit passing through said anode means, said ionization gap, said cathode, and said magnetic field generating means;
a closed-loop ion-emitting slit substantially of the same configuration as said anode, said slit being formed in said cathode in the path of said magnetoconductive circuit;
electric power supply means for maintaining said anode under a positive charge and said cathode under a negative charge;
means for the supply of a working medium into said hollow housing of said cathode means to form an ion beam when said working medium passes through said ionization gap, said beam having a direction of propagation towards said object;
and
means for moving said anode with respect to said cathode in said direction of propagation for adjusting said anode-cathode distance and thus adjusting said performance characteristics of said ion beam source, said means for moving said anode with respect to said cathode comprising a linear displacement mechanism.

5 more elements

Dependencies are inferred from the claim text.

Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ionization gap

Life of this patent

Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ionization gap

Life of this patent

Abstract

Claims16