US 6,147,349 AGranted

Method for fabricating a self-focusing detector pixel and an array fabricated in accordance with the method

AssigneeRaytheon Company

InventorMichael Ray

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Abstract

Disclosed is a method for fabricating an array of electromagnetic radiation responsive photodiodes, and an array fabricated in accordance with the method. The method includes steps of (a) providing a transparent substrate (12); (b) growing on the substrate an electrically conductive buffer layer (14), an n-type radiation absorbing layer (16), and a p-type cap layer (18) forming a p-n junction; and (c) etching first trenches through the cap layer, the radiation absorbing layer, and partially through the buffer layer for forming initial mesa structures each having a top surface, a base, and sloping sidewalls that terminate in the buffer layer. The method further (d) forms a passivating layer (22) on the sloping side walls; (e) forms an electrical contact (24) that surrounds the bases of the initial mesa structures and that makes an ohmic contact with a surrounding portion of the buffer layer; and (f) etches a plurality of second trenches through exposed portions of the buffer layer and into the substrate. The second trenches delineate a plurality of larger mesa structures each of which supports one of the initial mesa structures. A common layer of metalization (30) is applied to exposed surfaces of the second trenches and is coupled to each of the electrical contacts. Each of the larger mesa structures has sloping side walls disposed at an angle for supporting internal reflection of radiation that is incident on the substrate, thereby concentrating the incident radiation into the radiation absorbing layer.

Claims17

Dependent claims

A method for fabricating an array of electromagnetic radiation responsive photodiodes, comprising the steps of:

providing a substrate that is substantially transparent to wavelengths within a range of wavelengths of interest;
growing a plurality of layers upon a first surface of the substrate that is opposite to a second, radiation receiving surface of the substrate, the plurality of layers including an electrically conductive buffer layer, a radiation absorbing layer having a first type of conductivity, and a cap layer having a second type of conductivity opposite the conductivity of the radiation absorbing layer for forming a p-n junction therewith;
etching a plurality of first orthogonally disposed trenches through the cap layer, through the radiation absorbing layer, and partially through the buffer layer for differentiating the radiation absorbing layer and the cap layer into a plurality of initial mesa structures each having a base, a top surface, and sloping sidewalls that extend from the top surface to the base that terminates in the buffer layer;
forming a passivating layer on the sloping side walls;
forming an electrical contact that surrounds the base of each of the initial mesa structures, the electrical contact partially overlapping the passivating layer and forming an ohmic contact with a surrounding portion of the buffer layer;
etching a plurality of second orthogonally disposed trenches through exposed portions of the buffer layer and into the substrate for electrically isolating each of the initial mesa structures one from the other, the second orthogonally disposed trenches delineating a plurality of larger mesa structures individual ones of which support one of the initial mesa structures;
and
applying a common layer of metalization to exposed surfaces of the second orthogonally disposed trenches, the common layer of metalization being conductively coupled to each of the electrical contacts that surround the base of each of the initial mesa structures.

5 more elements

An array of electromagnetic radiation responsive photodiodes, comprising:

a substrate that is substantially transparent to wavelengths within a range of wavelengths of interest;
a plurality of layers disposed over a first surface of said substrate that is opposite to a second, radiation receiving surface of said substrate, said plurality of layers comprising an electrically conductive buffer layer, a radiation absorbing layer having a first type of conductivity, and a cap layer having a second type of conductivity opposite the conductivity of said radiation absorbing layer for forming a p-n junction therewith, said cap layer and said radiation absorbing layer being differentiated into a plurality of first mesa structures each having a base, a top surface, and sloping sidewalls that extend from said top surface to said base and terminating in said buffer layer;
a passivating layer disposed on said sloping side walls;
an electrical contact surrounding said base of each of said first mesa structures, said electrical contact partially overlapping said passivating layer and forming an ohmic contact with a surrounding portion of said buffer layer;
a plurality of second mesa structures an individual one of which support one of said first mesa structures, said second mesa structures having sloping side walls that extend through said buffer layer and into said substrate for electrically isolating each of said first mesa structures one from the other;
and
a common layer of metalization disposed over said sloping sidewalls of said second mesa structures, said common layer of metalization being conductively coupled to each of said electrical contacts that surround the base of each of the first mesa structures.

4 more elements

A method for fabricating an array of infrared (IR) radiation responsive photovoltaic devices, comprising the steps of:

providing a substrate that is substantially transparent to wavelengths within a range of IR wavelengths of interest;
growing a plurality of epitaxial Group II-VI alloy layers upon a first surface of the substrate that is opposite to a second, IR radiation receiving surface of the substrate, the plurality of layers including an electrically conductive buffer layer, an n-type layer having a bandgap selected for absorbing IR radiation within the range of IR wavelengths of interest, and a p-type cap layer for forming a p-n junction with the n-type radiation responsive layer, a bandgap of the buffer layer being wider than a bandgap of the n-type radiation absorbing layer;
wet chemical etching a plurality of first orthogonally disposed trenches through the cap layer, through the radiation absorbing layer, and partially through the buffer layer for differentiating the radiation absorbing layer and the cap layer into a plurality of initial mesa structures each having a base, a top surface, and sloping sidewalls that extend from the top surface to the base that terminates in the buffer layer;
forming a passivating layer on the sloping side walls;
depositing an electrical contact that surrounds the base of each of the initial mesa structures, the electrical contact forming an ohmic contact with a surrounding portion of the buffer layer;
reactive ion etching a plurality of second orthogonally disposed trenches through exposed portions of the buffer layer and into the substrate for electrically isolating each of the initial mesa structures one from the other, the second orthogonally disposed trenches delineating a plurality of larger mesa structures individual ones of which support one of the initial mesa structures and having sloping side walls disposed at an angle for supporting internal reflection of IR radiation that is incident on the radiation receiving surface of the substrate;
and
depositing a common layer of metalization to exposed surfaces of the second orthogonally disposed trenches, the common layer of metalization being conductively coupled to each of the electrical contacts that surround the base of each of the initial mesa structures.

5 more elements

Dependencies are inferred from the claim text.