Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3
AssigneeThe United States of America as represented by the United States Department of Energy
InventorsXiao-Dong Xiang, Hauyee Chang, Ichiro Takeuchi
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Abstract
A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.
Claims16
A method of forming a dielectric thin film of general formula (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3 the method comprising the steps of:
- a) providing a substrate;
- b) depositing titanium dioxide, barium, strontium, and calcium on the substrate;
- and
- c) heating the substrate containing the deposited titanium dioxide, barium, strontium, and calcium.
A method of forming a dielectric thin film of general formula (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3 the method comprising the steps of:
- a) providing a substrate;
- b) depositing TiO.sub.2, BaCO.sub.3, SrCO.sub.3 and CaCO.sub.3 on the substrate;
- and
- c) heating the substrate containing the deposited TiO.sub.2, BaCO.sub.3, SrCO.sub.3 and CaCO.sub.3.
A method of forming a dielectric thin film of general formula (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3 the method comprising the steps of:
- a) providing a triangular shaped substrate;
- b) depositing titanium dioxide, barium, strontium, and calcium on the triangular shaped substrate in a sequentially random order with a computer controlled shutter system;
- c) rotating the triangular shaped substrate 120.degree. after each subsequent deposition;
- and
- d) heating the triangular shaped substrate containing the deposited titanium dioxide, barium, strontium, and calcium.
A method of forming a dielectric thin film of general formula (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3 the method comprising the steps of:
- a) providing a triangular shaped substrate;
- b) depositing TiO.sub.2, BaCO.sub.3, SrCO.sub.3 and CaCO.sub.3 on the triangular shaped substrate in a sequentially random order with a computer controlled shutter system;
- c) rotating the triangular shaped substrate 120.degree. after each subsequent deposition;
- and
- d) heating the triangular shaped substrate containing the deposited TiO.sub.2, BaCO.sub.3, SrCO.sub.3 and CaCO.sub.3.
Dependencies are inferred from the claim text.