Photoresist using dioxaspiro ring-substituted acryl derivatives
AssigneeKorea Advanced Institute of Science and Technology
InventorsJin Baek Kim, Jong Jin Park, Ji Hyun Jang
Life of this patent
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Abstract
Disclosed is photoresist using dioxaspiro ring-substitued acryl derivatives, represented by the following chemical formula I or II. As matrix polymers, homopolymers of dioxaspiro ring-substitued acryl monomers or their copolymers with acryl monomers are provided. The deprotection of the dioxaspiro rings from the matrix polymers, usually accomplished by the action of a photoacid generator, causes a great change in the water solubility of the matrix, thereby allowing the matrix to be used for the photoresist required to have high sensitivity, resolution and contrast.
Claims6
A photoresist using a dioxaspiro ring-substitued acryl derivative, comprising a homopolymer of a dioxaspiro ring-containing acryl derivative, represented by the following general formula I, or its copolymer with an acryl derivative:
- ##STR5## wherein, R.sub.1 is H or CH.sub.3 ;
- R.sub.2 is COO, C.sub.6 H.sub.4, C.sub.6 H.sub.4 O, C.sub.6 H.sub.4 CH.sub.2 O, C.sub.6 H.sub.10, C.sub.6 H.sub.10 O or C.sub.6 H.sub.10 OCH.sub.2 O;
- and R.sub.3, R.sub.4, R.sub.5, R.sub.6 and n, each, are subjected to one of the following cases:
- a) n is an integer of 2 to 16 and R.sub.3 .dbd.R.sub.4 .dbd.R.sub.5 .dbd.R.sub.6 .dbd.H;
- b) n is an integer of 2 to 16 and R.sub.3 .dbd.R.sub.4 .dbd.R.sub.5 .dbd.H and R.sub.6 is an alkyl group containing 1-5 carbon atoms, CH.sub.3, CH.sub.3 O, CH.sub.2 CH.sub.3, CH.sub.2 CH.sub.3 O, OH or COOH;
- c) n is an integer of 2 to 16 and R.sub.3 .dbd.R.sub.5 .dbd.R.sub.6 .dbd.H and R.sub.4 is an alkyl group containing 1-8 carbon atoms, CH.sub.3, CH.sub.3 O, CH.sub.2 CH.sub.3, CH.sub.2 CH.sub.3 O, OH, COOH, NO.sub.2, NH.sub.2, or a halogen;
- d) n is an integer of 2 to 16 and R.sub.4 .dbd.R.sub.5 .dbd.R.sub.6 .dbd.H and R.sub.3 is an alkyl group containing 1-8 carbon atoms, CH.sub.3, CH.sub.3 O, CH.sub.2 CH.sub.3, CH.sub.2 CH.sub.3 O, OH, COOH, NO.sub.2, NH.sub.2, or a halogen;
- e) n is an integer of 2 to 16 and R.sub.3 .dbd.R.sub.4 .dbd.R.sub.6 .dbd.H and R.sub.5 is an alkyl group containing 1-5 carbon atoms;
- or
- f) n is 6, R.sub.4 is H and R.sub.3, R.sub.5 and R.sub.6, each, are CH.sub.2 at positions 1, 3 and 5.
Dependencies are inferred from the claim text.