Functional particle-dispersed thin film, granular magnetic thin film and production processes thereof
AssigneeAlps Electric Co., Ltd.
InventorsYoshihiko Hirotsu, Bo Bian, Akihiro Makino
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Abstract
A functional particle-dispersed thin film and a granular magnetic thin film are described with production processes thereof. The thin film is composed of plural seed crystal particles each dispersedly formed on a matrix or primary coat each having crystalline orientation by growing epitaxially to the matrix or primary coat so as to align its crystal orientation with that of the matrix or primary coat, and functional particles each formed around the plural seed crystal particles by growing epitaxially to and surrounding each of the plural seed crystal particles.
Claims28
A functional particle-dispersed thin film comprising:
- a plurality of seed crystal particles having a seed crystalline orientation and dispersedly formed on a layer having a predetermined crystalline orientation and selected from one of the group consisting of a matrix and a primary coat, the seed crystal particles grown epitaxially such that the seed crystalline orientation is aligned with the predetermined crystalline orientation of the layer, and
- functional particles formed around the seed crystal particles by epitaxial growth and surrounding each of the seed crystal particles.
A granular magnetic thin film comprising:
- a plurality of seed crystal particles having a seed crystalline orientation and dispersedly formed on a layer having a predetermined crystalline orientation and selected from one of the group consisting of a matrix and a primary coat, the seed crystal particles grown epitaxially such that the seed crystalline orientation is aligned with the predetermined crystalline orientation of the layer;
- ferromagnetic particles formed around the seed crystal particles by epitaxial growth and surrounding each of the seed crystal particles;
- and
- a segregating layer formed around the ferromagnetic particles to segregate and cover the ferromagnetic particles.
A process of producing a functional particle-dispersed thin film comprising:
- epitaxially growing atom particles as cores of seed crystal particles on a layer selected from the group consisting of a substrate and a primary coat, the layer having a layer crystalline orientation, the seed crystal particles being dispersed on the layer;
- epitaxially growing constitutive atoms of functional particles onto surfaces of the seed crystal particles such that the functional particles surround each of the seed crystal particles;
- and
- forming a segregating layer to surround each of the functional particles.
A process of producing a granular magnetic thin film comprising:
- epitaxially growing atom particles as cores of seed crystal particles on a layer selected from the group consisting of a substrate and a primary coat, the layer having a layer crystalline orientation, the seed crystal particles being dispersed on the layer;
- epitaxially growing constitutive atoms of ferromagnetic particles onto surfaces of the seed crystal particles such that the ferromagnetic particles surround each of the seed crystal particles;
- and
- forming a segregating layer to surround each of the ferromagnetic particles.
Dependencies are inferred from the claim text.