Barrier metallization in ceramic substrate for implantable medical devices
AssigneeMedtronic, Inc.
InventorsSamuel F. Haq, Patrick F. Malone, Donald P. Varner
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Abstract
The present invention relates to multi-layer ceramic packaging of hybrid micro-electronic devices, including those for implantable medical devices. The invention permits size reduction and design simplification in such packaging by eliminating the need for electrolytic or electroless plating, and by eliminating or substantially eliminating the shrinkage variation typically associated with surface metallization techniques.
Claims24
A substrate for use in implantable medical device applications, comprising:
- (a) at least three stacked, laminated and trimmed ceramic layers formed from green tape, wherein at least one of the at least three ceramic layers is an internal layer, and wherein two of the at least three ceramic layers are first and second external layers, the first external layer forming an external upper surface of the substrate, the second external layer forming an external lower surface of the substrate;
- (b) at least one internal via formed in the at least one internal layer, the internal via being formed from an internal via paste;
- (c) at least one external via formed in at least one of the external layers, the external via being formed from an external via paste, the external via paste having no tungsten or molybdenum therein, the external via paste comprising ceramic powder and at least one metal selected from the group consisting of palladium, platinum, osmium, iridium, technetium, rhenium, rhodium and ruthenium, and alloys, mixtures and combinations thereof;
- (d) at least one internal metallization circuitry pattern disposed on at least one of an upper surface and a lower surface of at least one internal layer and formed from an internal paste;
- (e) at least one intermediate metallization circuitry pattern disposed on at least one of the upper surface and the lower surface of the at least one internal layer, where at least portions of the at least one internal layer having the intermediate metallization circuitry pattern disposed therein engage directly at least portions of the least one external layer;
- wherein the unfired stacked, laminated and trimmed ceramic layers are fired in the ordered steps of:
- (i) firing at high temperatures in a reducing atmosphere;
- (ii) firing at low temperatures in an inert atmosphere, and (iii) firing at low temperatures in an air atmosphere, to form the substrate.
A substrate for use in implantable medical device applications, comprising:
- at least three stacked, laminated and trimmed ceramic layers formed from green tape, wherein at least one of the at least three ceramic layers is an internal layer, and wherein two of the at least three ceramic layers are first and second external layers, the first external layer forming an external upper surface of the substrate, the second external layer forming an external lower surface of the substrate;
- at least one internal via formed in the at least one internal layer, the internal via being formed from an internal via paste;
- at least one external via formed in at least one of the external layers, the external via being formed from an external via paste, the external via paste comprising at least about 70% by weight ruthenium refractory powder and about 30% by weight or less pre-milled, high-temperature ceramic powder;
- at least one internal metallization circuitry pattern disposed on at least one of an upper surface and a lower surface of at least one internal layer and formed from an internal paste;
- and
- at least one intermediate metallization circuitry pattern disposed on at least one of the upper surface and the lower surface of the at least one internal layer formed of an alloy, mixture or combination of the metals employed to form an internal metallization layer and the external via, where at least portions of the at least one internal layer having the intermediate metallization circuitry pattern disposed therein engage directly at least portions of the least one external layer.
A substrate for use in implantable medical device applications, comprising:
- at least three stacked, laminated and trimmed ceramic layers formed from green tape, wherein at least one of the at least three ceramic layers is an internal layer, and wherein two of the at least three ceramic layers are first and second external layers, the first external layer forming an external upper surface of the substrate, the second external layer forming an external lower surface of the substrate;
- at least one internal via formed in the at least one internal layer, the internal via being formed from an internal via paste comprising at least about 70% by weight tungsten or molybdenum refractory powder, or alloys, mixtures, or combinations thereof, and about 30% by weight or less pre-milled, high-temperature ceramic powder;
- at least one external via formed in at least one of the external layers, the external via being formed from an external via paste, the external via paste having no tungsten or molybdenum therein, the external via paste comprising ceramic powder and at least one metal selected from the group consisting of palladium, platinum, osmium, iridium, technetium, rhenium, rhodium and ruthenium, and alloys, mixtures and combinations thereof;
- at least one internal metallization circuitry pattern disposed on at least one of an upper surface and a lower surface of at least one internal layer and formed from an internal paste;
- and
- at least one intermediate metallization circuitry pattern disposed on at least one of the upper surface and the lower surface of the at least one internal layer formed of an alloy, mixture or combination of the metals employed to form an internal metallization layer and the external via, where at least portions of the at least one internal layer having the intermediate metallization circuitry pattern disposed therein engage directly at least portions of the least one external layer.
Dependencies are inferred from the claim text.