Stable hydride source compositions for manufacture of semiconductor devices and structures

A metal hydride derivative of the formula MY.sub.n

• wherein M is an n-valent metal selected from-the group consisting of:
• Sc, Y, Ti, Zr, V, Nb, Hf, Ta, Al, Ga, Ge, In, Sb, Tl, Pb, Bi, Cr, Mn, Fe, Co, Ni, Cu, Zn, Mo, Tc, Ru, Rh, Pd, Ag, Cd, W, Re, Os, Ir, Pt, Au, and Hg,
• each Y is independently selected from the group consisting of hydrogen, deuterium (.sup.2.sub.1 H) isotope, tritium (.sup.3.sub.1 H) isotope, and halo,
• n is at least 2,
• with the provisos that:
• at least one Y constituent is either deuterium (.sup.2.sub.1 H) isotope or tritium (.sup.3.sub.1 H) isotope;
• when the metal is Sb, said metal hydride derivative is selected from the group consisting of (i) SbH.sub.2 (.sup.2.sub.1 H), (ii) SbH(.sup.2.sub.1 H).sub.2, (iii) Sb(.sup.3.sub.1 H).sub.3, (iv) SbH(.sup.3.sub.1 H).sub.2, and (v) SbH.sub.2 (.sup.3.sub.1 H);
• and when the metal is Ge, said metal hydride derivative is selected from the group consisting of (i) GeH.sub.2 (.sup.2.sub.1 H).sub.2, (ii) GeH.sub.3 (.sup.2.sub.1 H), (iii) Ge(.sup.3.sub.1 H).sub.4, (iv) GeH(.sup.3.sub.1 H).sub.3, (v) GeH.sub.2 (.sup.3.sub.1 H).sub.2 and (vi) GeH.sub.3 (.sup.3.sub.1 H).

A metal hydride derivative of the formula:

• Y.sub.x MR.sub.y
• wherein:
• M is a z-valent metal selected from the group consisting of:
• Sc, Y, Ti, Zr, V, Nb, Hf, Ta, Al, Ga, Ge, In, Sb, Sn, Tl, Pb, Bi, Cr, Mn, Fe, Co, Ni, Cu, Zn, Mo, Tc, Ru, Rh, Pd, Ag, Cd, W, Re, Os, Ir, Pt, Au, and Hg;
• each Y is independently selected from the group consisting of hydrogen, deuterium (.sup.2.sub.1 H) isotope and tritium (.sup.3.sub.1 H) isotope;
• R is independently selected from the group consisting of C.sub.1 -C.sub.8 alkyl, C.sub.1 -C.sub.8 perfluoroalkyl, C.sub.1 -C.sub.8 haloalkyl, C.sub.6 -C.sub.10 aryl, C.sub.6 -C.sub.10 perfluoroaryl, C.sub.6 -C.sub.10 haloaryl, C.sub.6 -C.sub.10 cycloalkyl, substituted C.sub.6 -C.sub.10 aryl and halo;
• x is at least one;
• x+y=z;
• with the provisos that:
• at least one Y is either deuterium (.sup.2.sub.1 H) isotope or tritium (3.sub.1 H) isotope;
• when y is zero and the metal is Sb, said metal hydride derivative is selected from the group consisting of (i) Sb(.sup.3.sub.1 H).sub.3, (ii) SbH(.sup.3.sub.1 H).sub.2, and (iii) SbH.sub.2 (.sup.3.sub.1 H);
• when y is 1 or 2, and the metal is Sb, R is not C.sub.1 -C.sub.8 alkyl;
• when y is zero and the metal is Ge, said metal hydride derivative is selected from the group consisting of (i) GeH.sub.2 (.sup.2.sub.1 H).sub.2, (ii) GeH.sub.3 (.sup.2.sub.1 H), (iii) Ge(.sup.3.sub.1 H).sub.4, (iv) GeH(.sup.3.sub.1 H).sub.3, (v) GeH.sub.2 (.sup.3.sub.1 H).sub.2 and (vi) GeH.sub.3 (.sup.3.sub.1 H);
• and when the metal is Sn, y is at least one.

A metal hydride derivative of the formula:

• Y.sub.x MR.sub.y
• wherein:
• M is a z-valent metal selected from the group consisting of:
• Sc, Y, Ti, Zr, V, Nb, Hf, Ta, Al, Ga, Ge, In, Sb, Sn, Tl, Pb, Bi, Cr, Mn, Fe, Co, Ni, Cu, Zn, Mo, Tc, Ru, Rh, Pd, Ag, Cd, W, Re, Os, Ir, Pt, Au, and Hg;
• each Y is independently selected from the group consisting of hydrogen, deuterium (.sup.2.sub.1 H) isotope and tritium (.sup.3.sub.1 H) isotope;
• R is independently selected from the group consisting of C.sub.1 -C.sub.8 alkyl, C.sub.1 -C.sub.8 perfluoroalkyl, C.sub.1 -C.sub.8 haloalkyl, C.sub.6 -C.sub.10 aryl, C.sub.6 -C.sub.10 perfluoroaryl, C.sub.6 -C.sub.10 haloaryl, C.sub.6 -C.sub.10 cycloalkyl, substituted C.sub.6 -C.sub.10 aryl and halo;
• x is at least one;
• x+y=z;
• wherein at least one Y is tritium (.sup.3.sub.1 H) isotope.

An antimony hydride derivative of the formula:

• Y.sub.x SbR.sub.y
• wherein:
• each Y is independently selected from the group consisting of hydrogen, deuterium (.sup.2.sub.1 H) isotope and tritium (.sup.3.sub.1 H) isotope;
• R is independently selected from the group consisting of C.sub.1 -C.sub.8 alkyl, C.sub.1 -C.sub.8 perfluoroalkyl, C.sub.1 -C.sub.8 haloalkyl, C.sub.6 -C.sub.10 aryl, C.sub.6 -C.sub.10 perfluoroaryl, C.sub.6 -C.sub.10 haloaryl, C.sub.6 -C.sub.10 cycloalkyl, substituted C.sub.6 -C.sub.10 aryl and halo;
• x is at least one;
• y is at least one;
• x+y=3;
• with the proviso at least one Y is tritium (.sup.3.sub.1 H) isotope.