Reactive agent and process for decomposing nitrogen fluoride
AssigneeShowa Denko K.K.
InventorsHitoshi Atobe, Toraichi Kaneko
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Abstract
A process for decomposing nitrogen fluoride, comprising contacting gaseous nitrogen fluoride with a solid reactive agent for decomposition at 200.degree. C. or more to fix the fluorine component in the nitrogen fluoride to the reactive agent and at the same time control generation of nitrogen oxides, fluorocarbon and carbon monoxide as by-products, the reactive agent containing elemental carbon; aluminum compound, iron compound, manganese compound and/or alkaline earth metal; alkali metal compound; and nickel compound, tin compound and/or copper compound.
Claims11
A reactive agent for decomposing nitrogen fluoride, comprising compounds of the following groups (I) to (IV):
- group (I):
- elemental carbon;
- group (II):
- an aluminum compound, an iron compound, a manganese compound and/or an alkaline earth metal compound;
- group (III):
- an alkali metal compound;
- and
- group (IV):
- a nickel compound, a tin compound and/or a copper compound;
- wherein the composition ratios of compounds of groups (I) to (IV) present in said reactive agent is in terms of the atomic ratio of each metal present in the compounds of groups (II) to (IV) based on the atomic ratio of the elemental carbon of group (I) being 1, such that the compound of group (II) is from 0.05 to 1.0, the compound of group (III) is from 0.01 to 0.2, and the compound of group (IV) is from 0.01 to 0.2.
A process for decomposing nitrogen fluoride, comprising contacting a gas containing nitrogen fluoride with a reactive agent for decomposition comprising compounds of the following groups (I) to (IV):
- group (I):
- elemental carbon;
- group (II):
- an aluminum compound, an iron compound, a manganese compound and/or an alkaline earth metal compound;
- group (III):
- an alkali metal compound;
- and
- group (IV):
- a nickel compound, a tin compound and/or a copper compound;
- at 200.degree. C. or more.
Dependencies are inferred from the claim text.