Method and apparatus for dry surface treatment of an object
AssigneeL'Air Liquide Societe Anonyme pour l 'Etude et l 'Exploitation des Procedes Georges Claude
InventorsThierry Sindzingre, Stephane Rabia
Life of this patent
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Abstract
In this process for dry surface treatment of at least one surface portion of an object, a gas is passed through an instrument for forming excited or unstable gas species, and said surface portion is brought in front of the outlet of said device with a view to treating it with said excited or unstable gas species, the secondary gas delivered as outlet from the instrument being subsequently taken in again by the Venturi effect and reinjected into the instrument.
Claims17
A process for dry surface treatment of a surface of an object comprising the steps of:
- forming at a first site a secondary gas comprising excited or unstable gas species from a primary gas;
- treating the surface of an object with said secondary gas at a second site which is separate from said first site;
- and
- reinjecting said secondary gas used to treat the surface of an object at said second site to said first site using a venturi effect.
A device for dry treatment of a surface of an object comprising:
- (i) an instrument which converts a primary gas into a secondary gas comprising excited or unstable species, said instrument comprising:
- (a) a gas inlet passage in communication with a primary gas supply source;
- (b) an outlet passage for said secondary gas;
- (ii) an enclosure which defines an internal space connected in leaktight fashion to the outlet passage of said instrument or which includes said instrument;
- (iii) a venturi effect constriction arranged between the primary gas supply source and the inlet passage;
- (iv) a gas recirculation channel connecting the internal space of the enclosure to a zone downstream of the constriction which reinjects gas located in said enclosure, by a venturi effect, into the instrument.
Dependencies are inferred from the claim text.