Polishing machine
AssigneesProMOS Technology, Inc., Mosel Vitelic, Inc., Siemens Aktiengesellschaft
InventorChampion Yi
Life of this patent
Estimating the term…
Abstract
A wafer adapter for a chemical and mechanical polishing (CMP) machine. The adapter includes a retaining ring with multiple grooves formed on one surface of the ring and an inner circle for grasping just a wafer. The grooves have narrower openings at the outer and wider bottoms at the inner circle of the ring. The bottoms are apart from the inner circle with a circular wall. The adapter with wedged grooves served as slurry pools has been proved to have higher polishing efficiency, no wafer lose by sharp edges collision on the wall and less contact pressure between the wafer and the adapter to extend the lifetime of the adapter.
Claims7
An adapter for holding a wafer to a holder of a chemical-mechanical polishing machine, comprising:
- a retaining ring, having a plurality of grooves formed on one surface thereof, and an inner and outer circle thereof being adapted for grasping said wafer and the holder, respectively, wherein said grooves are open at said outer circle and closed from said inner circle by a wall;
- further wherein said grooves are formed with narrower openings at said outer circle of said ring.
An adapter for holding a wafer to a holder of a chemical-mechanical polishing machine, comprising:
- a retaining ring, having a plurality of grooves formed on one surface thereof, and an inner and outer circle thereof being adapted for grasping said wafer and the holder, respectively, wherein said grooves are open at said outer circle and closed from said inner circle by a wall;
- further wherein said grooves have narrower openings at said outer circle and wider bottoms at said inner circle of said ring.
An adapter for holding a wafer to a holder of a chemical-mechanical polishing machine, comprising:
- a retaining ring, having a plurality of grooves formed on one surface thereof, and an inner and outer circle thereof being adapted for grasping said wafer and the holder, respectively, wherein said grooves are open at said outer circle and closed from said inner circle by a wall;
- further wherein said grooves are in a wedge shape.
Dependencies are inferred from the claim text.