Method for supplying flush fluid
AssigneeMicron Technology, Inc.
InventorsDaniel G. Custer, Scott E. Moore
Life of this patent
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Abstract
An apparatus is provided with a wafer polishing tool, a source of slurry, and a source of low pressure de-ionized water. The slurry is supplied to the tool for chemical-mechanical planarization. Periodically, the slurry source is shut off and the de-ionized water is used to flush the apparatus. The desired safe low pressure of the de-ionized water may be maintained by opposed one-way check valves. The flushing system prevents the slurry from clogging or becoming stagnant, and prevents valves and pumps within the apparatus from malfunctioning. Moreover, the low pressure de-ionized water will not contaminate the higher pressure slurry even in the event of a system malfunction.
Claims11
A method of operating a wafer treatment apparatus, said method comprising the steps of:
- supplying slurry to said treatment apparatus at a first pressure;
- and
- subsequently, supplying de-ionized water to said treatment apparatus through a first one-way valve at a second pressure less than said first pressure.
A method of operating a slurry supply apparatus, said method comprising the steps of:
- supplying slurry to a tool through said slurry supply apparatus;
- flowing low pressure de-ionized water through a first one-way valve, the pressure of said de-ionized water being less than the pressure of said slurry;
- and
- flushing said de-ionized water through said slurry supply apparatus.
A method of operating a fluid handling apparatus, said method comprising the steps of:
- supplying a first fluid through a four-port valve apparatus at a first pressure;
- closing said valve apparatus;
- subsequently, flowing a flush fluid through a first one-way valve at a second pressure less than said first pressure;
- flowing said flush fluid through said four-port valve apparatus;
- and
- during said step of flowing said flush fluid through said four-port valve apparatus, maintaining said second pressure by draining said flush fluid through a second one-way valve.
Dependencies are inferred from the claim text.