Method and apparatus for adjusting minimum liquid level in a liquid supply bottle
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Liang Lin, Ming-Der Chen, Eric Chen
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Liang Lin, Ming-Der Chen, Eric Chen
Estimating the term…
An apparatus for adjusting a minimum liquid level in a liquid supply bottle that utilizes a novel height adjustment means and a method for utilizing such apparatus are provided. In the apparatus, a height adjustment means that is positioned on a base frame of a bottle station for supporting a liquid supply bottle is used. The height adjustment means includes two sliding blocks each having a right-angled triangular cross-section slidingly engaging each other on their hypotenuses. The two sliding blocks may be driven by two screws each threadingly engaging one of the side frames for pushing (or pulling) the sliding blocks toward (or away from) each other such that an elevation of the bottle can be increased (or decreased). The present invention novel apparatus further utilizes a bottle clamp which frictionally engaging the liquid supply bottle and hold it in place while allowing the bottle be moved up and down by slidingly engaging a vertical arm of the clamp with a side frame on the bottle station.
An apparatus for adjusting a minimum liquid level in a liquid supply bottle comprising:
A method for adjusting a liquid level in a liquid supply bottle sensed by a level sensor comprising the steps of:
Dependencies are inferred from the claim text.