Pressure sensor
AssigneeNyfotek AS
InventorsFrode Meringdal, Bj.o slashed.rn Erik Seeberg
Life of this patent
Estimating the term…
Abstract
A pressure sensor for measuring high pressures, the sensor being adapted to act externally on a measuring element, the measuring element having a central cavity and being composed of two parts which are sealingly joined in order to form the cavity, and comprising sensor means for measuring the mechanical stress condition of the measuring element. The two parts of the measuring element are manufactured in planar technology form silicium or quartz and have a substantially larger length than lateral dimensions, the cavity being oriented in a longitudinal direction, and the sensor means being piezo-resistive elements lying adjacent to the external or internal surface of the measuring element.
Claims25
A pressure sensor for high pressures comprising a measuring element having an external surface and a central cavity defined by an internal surface of said measuring element and being composed of two parts which are sealingly joined in order to form the cavity, and comprising sensor means for measuring a mechanical stress condition of the measuring element wherein:
- the two parts of the measuring element are manufactured in planar technology and have a substantially larger length than lateral dimensions, the cavity being centrally located within said measuring element, oriented in the longitudinal direction, and having a cross-sectional shape that is symmetric about at least two longitudinal planes, and said sensor means being piezo-resistive elements lying adjacent to at least one of said external and said internal surfaces of the measuring element.
A measuring apparatus for measuring high pressures comprising:
- a measuring element having a side that is externally subjected to the high pressure and thereby to a relatively large force, wherein the measuring element is manufactured in planar technology and is mounted in a housing having a through-hole defined in a wall of said housing and forming a measuring element-mounting portion of said housing,
- the measuring element being provided with an abutment portion adjacent to said measuring element-mounting portion at said high pressure side of said measuring element, and wherein the outer cross sectional contour of said measuring element at certain places is located radially outside the circumference of the hole.
Dependencies are inferred from the claim text.